DeleCut: Producing high-quality SOI structures by hydrogen ion implantation

Mikroelektronika

Volumn 31, Issue 4, 2002, Pages 274-281

  Popov, V P ^a   Antonova, I V ^a   Frantsuzov, A A ^a   Safronov, L N ^a   Popov, A I ^a   Naumova, O V ^a   Antonenko, A Kh ^a   Kilanov, D V ^a   Mironova, I V ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036424321     PISSN: 05441269     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)