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Volumn 143, Issue 3, 1996, Pages 995-1000

Computer simulation of oxygen precipitation in Czochralski-Grown silicon during HI-LO-HI anneals

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTER SIMULATION; CRYSTAL GROWTH FROM MELT; DIFFUSION; DISSOLUTION; MATHEMATICAL MODELS; NONLINEAR EQUATIONS; PARTIAL DIFFERENTIAL EQUATIONS; POINT DEFECTS; PRECIPITATION (CHEMICAL); STACKING FAULTS; STATISTICAL METHODS;

EID: 0030107571     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1836571     Document Type: Article
Times cited : (34)

References (21)
  • 1
    • 57649213231 scopus 로고
    • K. E. Bean and G. A. Rozgonyi, Editors, PV 84-7, The Electrochemical Society Proceedings Series, Pennington, NJ
    • B. Rogers, R. B. Fair, W. Dyson, and G. A. Rozgonyi, in VLSI Science and Technology/1984, K. E. Bean and G. A. Rozgonyi, Editors, PV 84-7, p. 74, The Electrochemical Society Proceedings Series, Pennington, NJ (1984).
    • (1984) VLSI Science and Technology/1984 , pp. 74
    • Rogers, B.1    Fair, R.B.2    Dyson, W.3    Rozgonyi, G.A.4
  • 3
    • 77957008755 scopus 로고
    • Chap. 10, R. K. Willardson, A. C. Beer, and E. R. Weber, Series Editors, F. Shimura, Volume Editor, Academic Press, New York
    • M. Schrems, in Oxygen in Silicon, Semiconductors and Semimetals, Chap. 10, Vol. 42, R. K. Willardson, A. C. Beer, and E. R. Weber, Series Editors, F. Shimura, Volume Editor, p. 391, Academic Press, New York (1994).
    • (1994) Oxygen in Silicon, Semiconductors and Semimetals , vol.42 , pp. 391
    • Schrems, M.1
  • 4
    • 0002434965 scopus 로고
    • H. R. Huff, W. Bergholz, and K. Sumino, Editors, PV 94-10, The Electrochemical Society Proceedings Series, Pennington, NJ
    • J. Esfandyari, S. Senkader, G. Hobler, H. W. Pötzl, and B. Murphy, in Semiconductor Silicon/1994, H. R. Huff, W. Bergholz, and K. Sumino, Editors, PV 94-10, p. 896, The Electrochemical Society Proceedings Series, Pennington, NJ (1994).
    • (1994) Semiconductor Silicon/1994 , pp. 896
    • Esfandyari, J.1    Senkader, S.2    Hobler, G.3    Pötzl, H.W.4    Murphy, B.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.