Impact of research on defects in silicon on the Microelectronic industry

Physica Status Solidi (B) Basic Research

Volumn 222, Issue 1, 2000, Pages 5-23

  Bergholz, W ^a   Gilles, D ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b SILTRONIC AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034336139     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3951(200011)222:1<5::AID-PSSB5>3.0.CO;2-L     Document Type: Article

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