Anormal growth of cavities in MeV He implanted Si covered with a thin Al foil

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 186, Issue 1-4, 2002, Pages 324-328

  Delamare, R ^a   Ntsoenzok, E ^a   Labohm, F ^b   Van Veen, A ^b   Grisolia, J ^c   Claverie, A ^c  

^a Centre National de la Recherche Scientifique   (France)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c CEMES CNRS   (France)

Author keywords

Cavities; Growth; Helium; Implantation; Silicon

Indexed keywords

CAVITY GROWTH;

ALUMINUM FOIL; ANNEALING; DESORPTION; DISLOCATIONS (CRYSTALS); HELIUM; ION IMPLANTATION;

SEMICONDUCTING SILICON;

EID: 0036135696     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00885-0     Document Type: Article

References (12)