SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 132, Issue , 2015, Pages 156-175

Lab-on-a-chip devices: How to close and plug the lab?

(4) Temiz, Yuksel a Lovchik, Robert D a Kaigala, Govind V a Delamarche, Emmanuel a

a IBM RESEARCH ZURICH (Switzerland)

Author keywords

Electrical interconnect; Fluidic interconnect; Lab on a chip; Microfabrication; Microfluidics; Sealing

Indexed keywords

MICROFABRICATION; MICROFLUIDICS; SEALING (FINISHING);

ELECTRICAL INTERCONNECTS; LAB-ON-A-CHIP DEVICES;

LAB-ON-A-CHIP;

EID: 84910052995 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2014.10.013 Document Type: Review

Times cited : (401)

References (250)

1
- 84910088527
- G.E. Moore Electronics 38 1965
- (1965) Electronics , vol.38
- Moore, G.E.¹

2
- 85056962317
- second ed. CRC Press
- M. Gad-el-Hak MEMS: introduction and fundamentals second ed. 2012 CRC Press
- (2012) MEMS: Introduction and Fundamentals
- Gad-El-Hak, M.¹

3
- 0000942144
- E. Bassous, H.H. Taub, and L. Kuhn Appl. Phys. Lett. 31 1977 135
- (1977) Appl. Phys. Lett. , vol.31 , pp. 135
- Bassous, E.¹ Taub, H.H.² Kuhn, L.³

4
- 0018653907
- S.C. Terry, J.H. Jerman, and J.B. Angell IEEE Trans. Electron Devices 26 1979 1880 1886
- (1979) IEEE Trans. Electron Devices , vol.26 , pp. 1880-1886
- Terry, S.C.¹ Jerman, J.H.² Angell, J.B.³

5
- 0025207507
- A. Manz, N. Graber, and H.M. Widmer Sens. Actuators B Chem. 1 1990 244 248
- (1990) Sens. Actuators B Chem. , vol.1 , pp. 244-248
- Manz, A.¹ Graber, N.² Widmer, H.M.³

6
- 85129644660
- CRC Press
- A. Folch Introduction to BioMEMS 2012 CRC Press
- (2012) Introduction to BioMEMS
- Folch, A.¹

7
- 0027810514
- P. Gravesen, J. Branebjerg, and O.S. Jensen J. Micromech. Microeng. 3 1993 168 182
- (1993) J. Micromech. Microeng. , vol.3 , pp. 168-182
- Gravesen, P.¹ Branebjerg, J.² Jensen, O.S.³

8
- 0037096666
- D.R. Reyes, D. Iossifidis, P.-A. Auroux, and A. Manz Anal. Chem. 74 2002 2623 2636
- (2002) Anal. Chem. , vol.74 , pp. 2623-2636
- Reyes, D.R.¹ Iossifidis, D.² Auroux, P.-A.³ Manz, A.⁴

9
- 33747117373
- G.M. Whitesides Nature 442 2006 368 373
- (2006) Nature , vol.442 , pp. 368-373
- Whitesides, G.M.¹

10
- 33744461297
- K.W. Oh, and C.H. Ahn J. Micromech. Microeng. 16 2006 R13 R39
- (2006) J. Micromech. Microeng. , vol.16 , pp. 13-R39
- Oh, K.W.¹ Ahn, C.H.²

11
- 79952312661
- C. Rivet, H. Lee, A. Hirsch, S. Hamilton, and H. Lu Chem. Eng. Sci. 66 2011 1490 1507
- (2011) Chem. Eng. Sci. , vol.66 , pp. 1490-1507
- Rivet, C.¹ Lee, H.² Hirsch, A.³ Hamilton, S.⁴ Lu, H.⁵

12
- 78650779972
- L.Y. Yeo, H.-C. Chang, P.P.Y. Chan, and J.R. Friend Small 7 2011 12 48
- (2011) Small , vol.7 , pp. 12-48
- Yeo, L.Y.¹ Chang, H.-C.² Chan, P.P.Y.³ Friend, J.R.⁴

13
- 79959736407
- L. Gervais, N. de Rooij, and E. Delamarche Adv. Mater. 23 2011 H151 H176
- (2011) Adv. Mater. , vol.23 , pp. 151-H176
- Gervais, L.¹ De Rooij, N.² Delamarche, E.³

14
- 84896284039
- E.K. Sackmann, A.L. Fulton, and D.J. Beebe Nature 507 2014 181 189
- (2014) Nature , vol.507 , pp. 181-189
- Sackmann, E.K.¹ Fulton, A.L.² Beebe, D.J.³

15
- 70349303095
- H. Becker Lab Chip 9 2009 2759 2762
- (2009) Lab Chip , vol.9 , pp. 2759-2762
- Becker, H.¹

16
- 84878061938
- R. Tantra, and H. van Heeren Lab Chip 13 2013 2199 2201
- (2013) Lab Chip , vol.13 , pp. 2199-2201
- Tantra, R.¹ Van Heeren, H.²

17
- 33646757520
- E. Verpoorte, and N.F. De Rooij Proc. IEEE 91 2003 930 953
- (2003) Proc. IEEE , vol.91 , pp. 930-953
- Verpoorte, E.¹ De Rooij, N.F.²

18
- 34247504603
- P. Abgrall, and A.-M. Gué J. Micromech. Microeng. 17 2007 R15 R49
- (2007) J. Micromech. Microeng. , vol.17 , pp. 15-R49
- Abgrall, P.¹ Gué, A.-M.²

19
- 84876099601
- P.N. Nge, C.I. Rogers, and A.T. Woolley Chem. Rev. 113 2013 2550 2583
- (2013) Chem. Rev. , vol.113 , pp. 2550-2583
- Nge, P.N.¹ Rogers, C.I.² Woolley, A.T.³

20
- 0036565073
- J. Garra, T. Long, J. Currie, T. Schneider, R. White, and M. Paranjape J. Vac. Sci. Technol. A Vacuum Surf. Film 20 2002 975
- (2002) J. Vac. Sci. Technol. A Vacuum Surf. Film , vol.20 , pp. 975
- Garra, J.¹ Long, T.² Currie, J.³ Schneider, T.⁴ White, R.⁵ Paranjape, M.⁶

21
- 54149091432
- D. Szmigiel, C. Hibert, A. Bertsch, E. Pamuła, K. Domański, and P. Grabiec Plasma Process. Polym. 5 2008 246 255 10.1002/ppap.200700130
- (2008) Plasma Process. Polym. , vol.5 , pp. 246-255
- Szmigiel, D.¹ Hibert, C.² Bertsch, A.³ Pamuła, E.⁴ Domański, K.⁵ Grabiec, P.⁶

22
- 84872089470
- M.-E. Vlachopoulou, G. Kokkoris, C. Cardinaud, E. Gogolides, and A. Tserepi Plasma Process. Polym. 10 2013 29 40
- (2013) Plasma Process. Polym. , vol.10 , pp. 29-40
- Vlachopoulou, M.-E.¹ Kokkoris, G.² Cardinaud, C.³ Gogolides, E.⁴ Tserepi, A.⁵

23
- 34247881939
- K. Tsougeni, A. Tserepi, and E. Gogolides Microelectron. Eng. 84 2007 1104 1108
- (2007) Microelectron. Eng. , vol.84 , pp. 1104-1108
- Tsougeni, K.¹ Tserepi, A.² Gogolides, E.³

24
- 84860841210
- M. Li, S. Li, J. Wu, W. Wen, W. Li, and G. Alici Microfluid. Nanofluid. 12 2011 751 760
- (2011) Microfluid. Nanofluid. , vol.12 , pp. 751-760
- Li, M.¹ Li, S.² Wu, J.³ Wen, W.⁴ Li, W.⁵ Alici, G.⁶

25
- 0031947320
- Y. Xia, and G.M. Whitesides Angew. Chem. Int. Ed. 37 1998 550 575
- (1998) Angew. Chem. Int. Ed. , vol.37 , pp. 550-575
- Xia, Y.¹ Whitesides, G.M.²

26
- 0033988843
- J.C. McDonald, D.C. Duffy, J.R. Anderson, D.T. Chiu, H. Wu, and O.J. Schueller Electrophoresis 21 2000 27 40
- (2000) Electrophoresis , vol.21 , pp. 27-40
- McDonald, J.C.¹ Duffy, D.C.² Anderson, J.R.³ Chiu, D.T.⁴ Wu, H.⁵ Schueller, O.J.⁶

27
- 0347134477
- S.K. Sia, and G.M. Whitesides Electrophoresis 24 2003 3563 3576
- (2003) Electrophoresis , vol.24 , pp. 3563-3576
- Sia, S.K.¹ Whitesides, G.M.²

28
- 84910067682
- (accessed 28.04.14)
- SoftLithoBox (Elveflow). < http://www.elveflow.com/microfluidic-related-products/pdms-soft-lithography-box >, 2014 (accessed 28.04.14).
- (2014) SoftLithoBox (Elveflow)

29
- 84910088526
- (accessed 28.04.14)
- FlowJEM. < http://www.flowjem.com >, 2014 (accessed 28.04.14).
- (2014) FlowJEM

30
- 84910067681
- (accessed 28.04.14)
- Microfluidic Innovations, LLC. < http://www.microfluidicinnovations.com >, 2014 (accessed 28.04.14).
- (2014)
- Microfluidic Innovations, LLC,¹

31
- 84910046759
- Scientific Device Laboratory (accessed 28.04.14)
- Scientific Device Laboratory. < http://www.scientificdevice.com/pdms-microfluidics >, 2014 (accessed 28.04.14).
- (2014)

32
- 0030035841
- E. Kim, Y. Xia, and G.M. Whitesides J. Am. Chem. Soc. 118 1996 5722 5731
- (1996) J. Am. Chem. Soc. , vol.118 , pp. 5722-5731
- Kim, E.¹ Xia, Y.² Whitesides, G.M.³

33
- 0032573880
- E. Delamarche, A. Bernard, H. Schmid, A. Bietsch, B. Michel, and H. Biebuyck J. Am. Chem. Soc. 120 1998 500 508
- (1998) J. Am. Chem. Soc. , vol.120 , pp. 500-508
- Delamarche, E.¹ Bernard, A.² Schmid, H.³ Bietsch, A.⁴ Michel, B.⁵ Biebuyck, H.⁶

34
- 73449143825
- J. Zhou, A.V. Ellis, and N.H. Voelcker Electrophoresis 31 2010 2 16
- (2010) Electrophoresis , vol.31 , pp. 2-16
- Zhou, J.¹ Ellis, A.V.² Voelcker, N.H.³

35
- 0034615958
- M.A. Unger, C. Hou-Pu, T. Todd, S. Axel, and S.R. Quake Science 288 2000 113 116
- (2000) Science , vol.288 , pp. 113-116
- Unger, M.A.¹ Hou-Pu, C.² Todd, T.³ Axel, S.⁴ Quake, S.R.⁵

36
- 0037131390
- T. Thorsen, S.J. Maerkl, and S.R. Quake Science 298 2002 580 584
- (2002) Science , vol.298 , pp. 580-584
- Thorsen, T.¹ Maerkl, S.J.² Quake, S.R.³

37
- 84910088525
- Fluidigm Corporation (accessed 28.04.14)
- Fluidigm Corporation. < http://www.fluidigm.com >, 2014 (accessed 28.04.14).
- (2014)

38
- 84885120182
- R. Safavieh, and D. Juncker Lab Chip 13 2013 4180 4189
- (2013) Lab Chip , vol.13 , pp. 4180-4189
- Safavieh, R.¹ Juncker, D.²

39
- 77957573156
- C.F. Carlborg, T. Haraldsson, M. Cornaglia, G. Stemme, and W. van der Wijngaart J. Microelectromech. Syst. 19 2010 1050 1057
- (2010) J. Microelectromech. Syst. , vol.19 , pp. 1050-1057
- Carlborg, C.F.¹ Haraldsson, T.² Cornaglia, M.³ Stemme, G.⁴ Van Der Wijngaart, W.⁵

40
- 77950821198
- M. Zhang, J. Wu, L. Wang, K. Xiao, and W. Wen Lab Chip 10 2010 1199 1203
- (2010) Lab Chip , vol.10 , pp. 1199-1203
- Zhang, M.¹ Wu, J.² Wang, L.³ Xiao, K.⁴ Wen, W.⁵

41
- 0036643808
- T. Fujii Microelectron. Eng. 61-62 2002 907 914
- (2002) Microelectron. Eng. , vol.61-62 , pp. 907-914
- Fujii, T.¹

42
- 66149129855
- K.S. Lee, and R.J. Ram Lab Chip 9 2009 1618 1624
- (2009) Lab Chip , vol.9 , pp. 1618-1624
- Lee, K.S.¹ Ram, R.J.²

43
- 62649094911
- M.-E. Vlachopoulou, A. Tserepi, P. Pavli, P. Argitis, M. Sanopoulou, and K. Misiakos J. Micromech. Microeng. 19 2009 015007
- (2009) J. Micromech. Microeng. , vol.19 , pp. 015007
- Vlachopoulou, M.-E.¹ Tserepi, A.² Pavli, P.³ Argitis, P.⁴ Sanopoulou, M.⁵ Misiakos, K.⁶

44
- 77951891808
- L. Tang, and N.Y. Lee Lab Chip 10 2010 1274 1280
- (2010) Lab Chip , vol.10 , pp. 1274-1280
- Tang, L.¹ Lee, N.Y.²

45
- 77957572182
- D. Cai, and A. Neyer Microfluid. Nanofluid. 9 2010 855 864
- (2010) Microfluid. Nanofluid. , vol.9 , pp. 855-864
- Cai, D.¹ Neyer, A.²

46
- 84885185347
- A. Baraket, N. Zine, M. Lee, J. Bausells, N. Jaffrezic-Renault, and F. Bessueille Microelectron. Eng. 111 2013 332 338
- (2013) Microelectron. Eng. , vol.111 , pp. 332-338
- Baraket, A.¹ Zine, N.² Lee, M.³ Bausells, J.⁴ Jaffrezic-Renault, N.⁵ Bessueille, F.⁶

47
- 82555193227
- M. Jamal, A.M. Zarafshar, and D.H. Gracias Nat. Commun. 2 2011 527
- (2011) Nat. Commun. , vol.2 , pp. 527
- Jamal, M.¹ Zarafshar, A.M.² Gracias, D.H.³

48
- 40949107008
- R. Mukhopadhyay Anal. Chem. 79 2007 3248 3253
- (2007) Anal. Chem. , vol.79 , pp. 3248-3253
- Mukhopadhyay, R.¹

49
- 80054966334
- E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo Lab Chip 11 2011 3752 3765
- (2011) Lab Chip , vol.11 , pp. 3752-3765
- Sollier, E.¹ Murray, C.² Maoddi, P.³ Di Carlo, D.⁴

50
- 84910025922
- ACAMP (Alberta Centre for Advanced MNT Products) (accessed 28.04.14)
- ACAMP (Alberta Centre for Advanced MNT Products). < http://www.acamp.ca >, 2014 (accessed 28.04.14).
- (2014)

51
- 84910053419
- (accessed 28.04.14)
- thinXXS Microtechnology AG. < http://www.thinxxs.com/ >, 2014 (accessed 28.04.14).
- (2014) ThinXXS Microtechnology AG

52
- 84910025921
- (accessed 28.04.14)
- ALine, Inc. < http://www.alineinc.com >, 2014 (accessed 28.04.14).
- (2014)
- ALine, Inc.,¹

53
- 84910067680
- (accessed 28.04.14)
- Epigem Ltd. < http://epigem.co.uk >, 2014 (accessed 28.04.14).
- (2014)
- Epigem Ltd.¹

54
- 84910088524
- microfluidic ChipShop GmbH. (accessed 28.04.14)
- microfluidic ChipShop GmbH. < http://www.microfluidic-chipshop.com >, 2014 (accessed 28.04.14).
- (2014)

55
- 0343550309
- H. Becker, and C. Gärtner Electrophoresis 21 2000 12 26
- (2000) Electrophoresis , vol.21 , pp. 12-26
- Becker, H.¹ Gärtner, C.²

56
- 0036494044
- O. Rötting, W. Röpke, H. Becker, and C. Gärtner Microsyst. Technol. 8 2002 32 36
- (2002) Microsyst. Technol. , vol.8 , pp. 32-36
- Rötting, O.¹ Röpke, W.² Becker, H.³ Gärtner, C.⁴

57
- 33747616169
- M. Heckele, A.E. Guber, and R. Truckenmüller Microsyst. Technol. 12 2006 1031 1035
- (2006) Microsyst. Technol. , vol.12 , pp. 1031-1035
- Heckele, M.¹ Guber, A.E.² Truckenmüller, R.³

58
- 60849122261
- U.M. Attia, S. Marson, and J.R. Alcock Microfluid. Nanofluid. 7 2009 1 28
- (2009) Microfluid. Nanofluid. , vol.7 , pp. 1-28
- Attia, U.M.¹ Marson, S.² Alcock, J.R.³

59
- 58249090780
- C.-W. Tsao, and D.L. DeVoe Microfluid. Nanofluid. 6 2008 1 16
- (2008) Microfluid. Nanofluid. , vol.6 , pp. 1-16
- Tsao, C.-W.¹ Devoe, D.L.²

60
- 34447312228
- D.A. Mair, M. Rolandi, M. Snauko, R. Noroski, F. Svec, and J.M.J. Fréchet Anal. Chem. 79 2007 5097 5102
- (2007) Anal. Chem. , vol.79 , pp. 5097-5102
- Mair, D.A.¹ Rolandi, M.² Snauko, M.³ Noroski, R.⁴ Svec, F.⁵ Fréchet, J.M.J.⁶

61
- 33751084908
- R. Truckenmüller, R. Ahrens, Y. Cheng, G. Fischer, and V. Saile Sens. Actuators A Phys. 132 2006 385 392
- (2006) Sens. Actuators A Phys. , vol.132 , pp. 385-392
- Truckenmüller, R.¹ Ahrens, R.² Cheng, Y.³ Fischer, G.⁴ Saile, V.⁵

62
- 77955516334
- Y. Luo, Z. Zhang, X. Wang, and Y. Zheng Microelectron. Eng. 87 2010 2429 2436
- (2010) Microelectron. Eng. , vol.87 , pp. 2429-2436
- Luo, Y.¹ Zhang, Z.² Wang, X.³ Zheng, Y.⁴

63
- 33744519559
- P. Kettner, R.L. Pelzer, T. Glinsner, S. Farrens, and D. Lee J. Phys: Conf. Ser. 34 2006 65 71
- (2006) J. Phys: Conf. Ser. , vol.34 , pp. 65-71
- Kettner, P.¹ Pelzer, R.L.² Glinsner, T.³ Farrens, S.⁴ Lee, D.⁵

64
- 33947670543
- C.W. Tsao, L. Hromada, J. Liu, P. Kumar, and D.L. DeVoe Lab Chip 7 2007 499 505
- (2007) Lab Chip , vol.7 , pp. 499-505
- Tsao, C.W.¹ Hromada, L.² Liu, J.³ Kumar, P.⁴ Devoe, D.L.⁵

65
- 84864674588
- F. Saharil, C.F. Carlborg, T. Haraldsson, and W. van der Wijngaart Lab Chip 12 2012 3032 3035
- (2012) Lab Chip , vol.12 , pp. 3032-3035
- Saharil, F.¹ Carlborg, C.F.² Haraldsson, T.³ Van Der Wijngaart, W.⁴

66
- 77952616543
- M. Focke, D. Kosse, C. Müller, H. Reinecke, R. Zengerle, and F. von Stetten Lab Chip 10 2010 1365 1386
- (2010) Lab Chip , vol.10 , pp. 1365-1386
- Focke, M.¹ Kosse, D.² Müller, C.³ Reinecke, H.⁴ Zengerle, R.⁵ Von Stetten, F.⁶

67
- 84860386158
- S. Miserere, G. Mottet, V. Taniga, S. Descroix, J.-L. Viovy, and L. Malaquin Lab Chip 12 2012 1849 1856
- (2012) Lab Chip , vol.12 , pp. 1849-1856
- Miserere, S.¹ Mottet, G.² Taniga, V.³ Descroix, S.⁴ Viovy, J.-L.⁵ Malaquin, L.⁶

68
- 84055207541
- R. Liedert, L.K. Amundsen, A. Hokkanen, M. Mäki, A. Aittakorpi, and M. Pakanen Lab Chip 12 2012 333 339
- (2012) Lab Chip , vol.12 , pp. 333-339
- Liedert, R.¹ Amundsen, L.K.² Hokkanen, A.³ Mäki, M.⁴ Aittakorpi, A.⁵ Pakanen, M.⁶

69
- 77955854202
- M. Heilig, S. Giselbrecht, A. Guber, and M. Worgull Microsyst. Technol. 16 2010 1221 1231
- (2010) Microsyst. Technol. , vol.16 , pp. 1221-1231
- Heilig, M.¹ Giselbrecht, S.² Guber, A.³ Worgull, M.⁴

70
- 79952655596
- R. Truckenmüller, S. Giselbrecht, N. Rivron, E. Gottwald, V. Saile, and A. van den Berg Adv. Mater. 23 2011 1311 1329
- (2011) Adv. Mater. , vol.23 , pp. 1311-1329
- Truckenmüller, R.¹ Giselbrecht, S.² Rivron, N.³ Gottwald, E.⁴ Saile, V.⁵ Van Den Berg, A.⁶

71
- 84891673633
- D. Kosse, F. Schwemmer, D. Buselmeier, R. Zengerle, F. von Stetten, in: 17th Int. Conf. Solid-State Sensors, Actuators Microsystems (TRANSDUCERS EUROSENSORS XXVII), IEEE, 2013, pp. 1318-1321.
- (2013) 17th Int. Conf. Solid-State Sensors, Actuators Microsystems (TRANSDUCERS EUROSENSORS XXVII), IEEE , pp. 1318-1321
- Kosse, D.¹ Schwemmer, F.² Buselmeier, D.³ Zengerle, R.⁴ Von Stetten, F.⁵

72
- 41149174255
- C.-S. Chen, D.N. Breslauer, J.I. Luna, A. Grimes, W.-C. Chin, and L.P. Lee Lab Chip 8 2008 622 624
- (2008) Lab Chip , vol.8 , pp. 622-624
- Chen, C.-S.¹ Breslauer, D.N.² Luna, J.I.³ Grimes, A.⁴ Chin, W.-C.⁵ Lee, L.P.⁶

73
- 0018030427
- K.E. Bean IEEE Trans. Electron Devices 25 1978 1185 1193
- (1978) IEEE Trans. Electron Devices , vol.25 , pp. 1185-1193
- Bean, K.E.¹

74
- 84903568545
- US5501893 A
- F. Laermer, A. Schilp, Plasma polymerizing temporary etch stop, < http://www.google.com/patents/US5501893 >, US5501893 A, 1996.
- (1996) Plasma Polymerizing Temporary Etch Stop
- Laermer, F.¹ Schilp, A.²

75
- 0038358325
- R. Huber, J. Conrad, L. Schmitt, K. Hecker, J. Scheurer, and M. Weber Microelectron. Eng. 67-68 2003 410 416
- (2003) Microelectron. Eng. , vol.67-68 , pp. 410-416
- Huber, R.¹ Conrad, J.² Schmitt, L.³ Hecker, K.⁴ Scheurer, J.⁵ Weber, M.⁶

76
- 0033363098
- B. Gray, D. Jaeggi, N. Mourlas, B. van Drieënhuizen, K. Williams, and N. Maluf Sens. Actuators A Phys. 77 1999 57 65
- (1999) Sens. Actuators A Phys. , vol.77 , pp. 57-65
- Gray, B.¹ Jaeggi, D.² Mourlas, N.³ Van Drieënhuizen, B.⁴ Williams, K.⁵ Maluf, N.⁶

77
- 70350686650
- R.D. Lovchik, U. Drechsler, and E. Delamarche J. Micromech. Microeng. 19 2009 115006
- (2009) J. Micromech. Microeng. , vol.19 , pp. 115006
- Lovchik, R.D.¹ Drechsler, U.² Delamarche, E.³

78
- 79955401338
- G.V. Kaigala, R.D. Lovchik, U. Drechsler, and E. Delamarche Langmuir 27 2011 5686 5693
- (2011) Langmuir , vol.27 , pp. 5686-5693
- Kaigala, G.V.¹ Lovchik, R.D.² Drechsler, U.³ Delamarche, E.⁴

79
- 70350637579
- M.J. Lopez-Martinez, E.M. Campo, D. Caballero, E. Fernandez, A. Errachid, and J. Esteve J. Micromech. Microeng. 19 2009 105013
- (2009) J. Micromech. Microeng. , vol.19 , pp. 105013
- Lopez-Martinez, M.J.¹ Campo, E.M.² Caballero, D.³ Fernandez, E.⁴ Errachid, A.⁵ Esteve, J.⁶

80
- 84860491925
- IEEE
- L. Ribetto, A. Homsy, N.F. de Rooij, in: 2012 IEEE 25th Int. Conf. Micro Electro Mech. Syst., IEEE, 2012, pp. 1057-1060.
- (2012) 2012 IEEE 25th Int. Conf. Micro Electro Mech. Syst. , pp. 1057-1060
- Ribetto, L.¹ Homsy, A.² De Rooij, N.F.³

81
- 0033743079
- H. Nakanishi, T. Nishimoto, M. Kanai, T. Saitoh, R. Nakamura, and T. Yoshida Sens. Actuators A Phys. 83 2000 136 141
- (2000) Sens. Actuators A Phys. , vol.83 , pp. 136-141
- Nakanishi, H.¹ Nishimoto, T.² Kanai, M.³ Saitoh, T.⁴ Nakamura, R.⁵ Yoshida, T.⁶

82
- 0034249327
- A. Sayah, D. Solignac, T. Cueni, and M.A.M. Gijs Sens. Actuators A Phys. 84 2000 103 108
- (2000) Sens. Actuators A Phys. , vol.84 , pp. 103-108
- Sayah, A.¹ Solignac, D.² Cueni, T.³ Gijs, M.A.M.⁴

83
- 4544222634
- Z.-J. Jia, Q. Fang, and Z.-L. Fang Anal. Chem. 76 2004 5597 5602
- (2004) Anal. Chem. , vol.76 , pp. 5597-5602
- Jia, Z.-J.¹ Fang, Q.² Fang, Z.-L.³

84
- 33747584160
- M.M.R. Howlader, S. Suehara, H. Takagi, T.H. Kim, R. Maeda, and T. Suga IEEE Trans. Adv. Packag. 29 2006 448 456
- (2006) IEEE Trans. Adv. Packag. , vol.29 , pp. 448-456
- Howlader, M.M.R.¹ Suehara, S.² Takagi, H.³ Kim, T.H.⁴ Maeda, R.⁵ Suga, T.⁶

85
- 84875827990
- Y. Xu, C. Wang, L. Li, N. Matsumoto, K. Jang, and Y. Dong Lab Chip 13 2013 1048 1052
- (2013) Lab Chip , vol.13 , pp. 1048-1052
- Xu, Y.¹ Wang, C.² Li, L.³ Matsumoto, N.⁴ Jang, K.⁵ Dong, Y.⁶

86
- 84885171963
- J. Kotowski, V. Navrátil, Z. Slouka, and D. Šnita Microelectron. Eng. 110 2013 441 445
- (2013) Microelectron. Eng. , vol.110 , pp. 441-445
- Kotowski, J.¹ Navrátil, V.² Slouka, Z.³ Šnita, D.⁴

87
- 84910076695
- (accessed 07.05.14)
- Micralyn. < http://www.micralyne.com/ >, 2014 (accessed 07.05.14).
- (2014) Micralyn

88
- 84910088523
- (accessed 28.04.14)
- Dolomite Microfluidics. < http://www.dolomite-microfluidics.com >, 2014 (accessed 28.04.14).
- (2014) Dolomite Microfluidics

89
- 84910025920
- iX-factory GmbH (accessed 28.04.14)
- iX-factory GmbH. < http://ix-factory.de/en.html >, 2014 (accessed 28.04.14).
- (2014)

90
- 84910095908
- (accessed 28.04.14)
- Invenios. < http://invenios.com >, 2014 (accessed 28.04.14).
- (2014) Invenios

91
- 84910088522
- (accessed 28.04.14)
- LioniX BV. < http://www.lionixbv.com >, 2014 (accessed 28.04.14).
- (2014) LioniX BV

92
- 84910025919
- Little Things Factory GmbH (accessed 28.04.14)
- Little Things Factory GmbH. < http://www.ltf-gmbh.com >, 2014 (accessed 28.04.14).
- (2014)

93
- 84910046758
- IMT Masken und Teilungen AG (accessed 28.04.14)
- IMT Masken und Teilungen AG. < http://www.imtag.ch >, 2014 (accessed 28.04.14).
- (2014)

94
- 84910025918
- Innovative Micro Technology (IMT) (accessed 28.04.14)
- Innovative Micro Technology (IMT). < http://www.imtmems.com >, 2014 (accessed 28.04.14).
- (2014)

95
- 84910025917
- (accessed 28.04.14)
- Qmicro B.V. < http://www.qmicro.nl >, 2014 (accessed 28.04.14).
- (2014)
- Qmicro, B.V.¹

96
- 38849204902
- D. Bartolo, G. Degré, P. Nghe, and V. Studer Lab Chip 8 2008 274 279
- (2008) Lab Chip , vol.8 , pp. 274-279
- Bartolo, D.¹ Degré, G.² Nghe, P.³ Studer, V.⁴

97
- 76949089133
- E.P. Dupont, R. Luisier, and M.A.M. Gijs Microelectron. Eng. 87 2010 1253 1255
- (2010) Microelectron. Eng. , vol.87 , pp. 1253-1255
- Dupont, E.P.¹ Luisier, R.² Gijs, M.A.M.³

98
- 77954970052
- R. Arayanarakool, S. Le Gac, and A. van den Berg Lab Chip 10 2010 2115 2121
- (2010) Lab Chip , vol.10 , pp. 2115-2121
- Arayanarakool, R.¹ Le Gac, S.² Van Den Berg, A.³

99
- 84893430855
- J. Li, Y. Wang, E. Dong, and H. Chen Lab Chip 14 2014 860 864
- (2014) Lab Chip , vol.14 , pp. 860-864
- Li, J.¹ Wang, Y.² Dong, E.³ Chen, H.⁴

100
- 0031221057
- H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, and P. Vettiger J. Micromech. Microeng. 7 1997 121 124
- (1997) J. Micromech. Microeng. , vol.7 , pp. 121-124
- Lorenz, H.¹ Despont, M.² Fahrni, N.³ Labianca, N.⁴ Renaud, P.⁵ Vettiger, P.⁶

101
- 0035336256
- R.J. Jackman, T.M. Floyd, R. Ghodssi, M.A. Schmidt, and K.F. Jensen J. Micromech. Microeng. 11 2001 263 269
- (2001) J. Micromech. Microeng. , vol.11 , pp. 263-269
- Jackman, R.J.¹ Floyd, T.M.² Ghodssi, R.³ Schmidt, M.A.⁴ Jensen, K.F.⁵

102
- 20144364628
- L. Schöler, B. Lange, K. Seibel, H. Schäfer, M. Walder, and N. Friedrich Microelectron. Eng. 78-79 2005 164 170
- (2005) Microelectron. Eng. , vol.78-79 , pp. 164-170
- Schöler, L.¹ Lange, B.² Seibel, K.³ Schäfer, H.⁴ Walder, M.⁵ Friedrich, N.⁶

103
- 33744523267
- L. Yu, F.E.H. Tay, G. Xu, B. Chen, M. Avram, and C. Iliescu J. Phys: Conf. Ser. 34 2006 776 781
- (2006) J. Phys: Conf. Ser. , vol.34 , pp. 776-781
- Yu, L.¹ Tay, F.E.H.² Xu, G.³ Chen, B.⁴ Avram, M.⁵ Iliescu, C.⁶

104
- 29144455448
- P. Abgrall, C. Lattes, V. Conédéra, X. Dollat, S. Colin, and A.M. Gué J. Micromech. Microeng. 16 2006 113 121
- (2006) J. Micromech. Microeng. , vol.16 , pp. 113-121
- Abgrall, P.¹ Lattes, C.² Conédéra, V.³ Dollat, X.⁴ Colin, S.⁵ Gué, A.M.⁶

105
- 84910051474
- E. Mitri, G. Birarda, L. Vaccari, S. Kenig, M. Tormen, and G. Grenci Lab Chip 2013
- (2013) Lab Chip
- Mitri, E.¹ Birarda, G.² Vaccari, L.³ Kenig, S.⁴ Tormen, M.⁵ Grenci, G.⁶

106
- 0035277919
- F. Niklaus, P. Enoksson, E. Kälvesten, and G. Stemme J. Micromech. Microeng. 11 2001 100 107
- (2001) J. Micromech. Microeng. , vol.11 , pp. 100-107
- Niklaus, F.¹ Enoksson, P.² Kälvesten, E.³ Stemme, G.⁴

107
- 0002429667
- S. Metz, R. Holzer, and P. Renaud Lab Chip 1 2001 29 34
- (2001) Lab Chip , vol.1 , pp. 29-34
- Metz, S.¹ Holzer, R.² Renaud, P.³

108
- 79952673363
- A.T. Ciftlik, and M.A.M. Gijs J. Micromech. Microeng. 21 2011 035011
- (2011) J. Micromech. Microeng. , vol.21 , pp. 035011
- Ciftlik, A.T.¹ Gijs, M.A.M.²

109
- 84055172801
- A.T. Ciftlik, and M.A.M. Gijs Lab Chip 12 2012 396 400
- (2012) Lab Chip , vol.12 , pp. 396-400
- Ciftlik, A.T.¹ Gijs, M.A.M.²

110
- 84875850620
- A.T. Ciftlik, H.-A. Lehr, and M.A.M. Gijs Proc. Natl. Acad. Sci. U.S.A. 110 2013 5363 5368
- (2013) Proc. Natl. Acad. Sci. U.S.A. , vol.110 , pp. 5363-5368
- Ciftlik, A.T.¹ Lehr, H.-A.² Gijs, M.A.M.³

111
- 18844442297
- S. Satyanarayana, R.N. Karnik, and A. Majumdar J. Microelectromech. Syst. 14 2005 392 399
- (2005) J. Microelectromech. Syst. , vol.14 , pp. 392-399
- Satyanarayana, S.¹ Karnik, R.N.² Majumdar, A.³

112
- 28944433175
- H. Wu, B. Huang, and R.N. Zare Lab Chip 5 2005 1393 1398
- (2005) Lab Chip , vol.5 , pp. 1393-1398
- Wu, H.¹ Huang, B.² Zare, R.N.³

113
- 52649097628
- S. Carroll, M.M. Crain, J.F. Naber, R.S. Keynton, K.M. Walsh, and R.P. Baldwin Lab Chip 8 2008 1564 1569
- (2008) Lab Chip , vol.8 , pp. 1564-1569
- Carroll, S.¹ Crain, M.M.² Naber, J.F.³ Keynton, R.S.⁴ Walsh, K.M.⁵ Baldwin, R.P.⁶

114
- 72849128694
- J. Bart, R. Tiggelaar, M. Yang, S. Schlautmann, H. Zuilhof, and H. Gardeniers Lab Chip 9 2009 3481 3488
- (2009) Lab Chip , vol.9 , pp. 3481-3488
- Bart, J.¹ Tiggelaar, R.² Yang, M.³ Schlautmann, S.⁴ Zuilhof, H.⁵ Gardeniers, H.⁶

115
- 67349202784
- K. Kontakis, A. Petropoulos, G. Kaltsas, T. Speliotis, and E. Gogolides Microelectron. Eng. 86 2009 1382 1384
- (2009) Microelectron. Eng. , vol.86 , pp. 1382-1384
- Kontakis, K.¹ Petropoulos, A.² Kaltsas, G.³ Speliotis, T.⁴ Gogolides, E.⁵

116
- 84864440328
- L. Gutierrez-Rivera, J. Martinez-Quijada, R. Johnstone, D. Elliott, C. Backhouse, and D. Sameoto J. Micromech. Microeng. 22 2012 085018
- (2012) J. Micromech. Microeng. , vol.22 , pp. 085018
- Gutierrez-Rivera, L.¹ Martinez-Quijada, J.² Johnstone, R.³ Elliott, D.⁴ Backhouse, C.⁵ Sameoto, D.⁶

117
- 84867975082
- M.T. Koesdjojo, J. Nammoonnoy, Y. Wu, R.T. Frederick, and V.T. Remcho J. Micromech. Microeng. 22 2012 115030
- (2012) J. Micromech. Microeng. , vol.22 , pp. 115030
- Koesdjojo, M.T.¹ Nammoonnoy, J.² Wu, Y.³ Frederick, R.T.⁴ Remcho, V.T.⁵

118
- 84874884758
- J.B. You, K.-I. Min, B. Lee, D.-P. Kim, and S.G. Im Lab Chip 13 2013 1266 1272
- (2013) Lab Chip , vol.13 , pp. 1266-1272
- You, J.B.¹ Min, K.-I.² Lee, B.³ Kim, D.-P.⁴ Im, S.G.⁵

119
- 58149378331
- A.W. Martinez, S.T. Phillips, and G.M. Whitesides Proc. Natl. Acad. Sci. U.S.A. 105 2008 19606 19611
- (2008) Proc. Natl. Acad. Sci. U.S.A. , vol.105 , pp. 19606-19611
- Martinez, A.W.¹ Phillips, S.T.² Whitesides, G.M.³

120
- 65349120623
- J. Kim, R. Surapaneni, and B.K. Gale Lab Chip 9 2009 1290 1293
- (2009) Lab Chip , vol.9 , pp. 1290-1293
- Kim, J.¹ Surapaneni, R.² Gale, B.K.³

121
- 77950931643
- C.S. Goh, S.C. Tan, K.T. May, C.Z. Chan, S.H. Ng, in: 2009 11th Electron. Packag. Technol. Conf., IEEE, 2009, pp. 737-740.
- (2009) 2009 11th Electron. Packag. Technol. Conf., IEEE , pp. 737-740
- Goh, C.S.¹ Tan, S.C.² May, K.T.³ Chan, C.Z.⁴ Ng, S.H.⁵

122
- 0038477339
- H. Lorenz, L. Paratte, R. Luthier, N.F. de Rooij, and P. Renaud Sens. Actuators A Phys. 53 1996 364 368
- (1996) Sens. Actuators A Phys. , vol.53 , pp. 364-368
- Lorenz, H.¹ Paratte, L.² Luthier, R.³ De Rooij, N.F.⁴ Renaud, P.⁵

123
- 0038779657
- E. Kukharenka, M.M. Farooqui, L. Grigore, M. Kraft, and N. Hollinshead J. Micromech. Microeng. 13 2003 S67 S74
- (2003) J. Micromech. Microeng. , vol.13 , pp. 67-S74
- Kukharenka, E.¹ Farooqui, M.M.² Grigore, L.³ Kraft, M.⁴ Hollinshead, N.⁵

124
- 13844321259
- P. Vulto, N. Glade, L. Altomare, J. Bablet, L. Del Tin, and G. Medoro Lab Chip 5 2005 158 162
- (2005) Lab Chip , vol.5 , pp. 158-162
- Vulto, P.¹ Glade, N.² Altomare, L.³ Bablet, J.⁴ Del Tin, L.⁵ Medoro, G.⁶

125
- 68249138761
- P. Vulto, T. Huesgen, B. Albrecht, and G.A. Urban J. Micromech. Microeng. 19 2009 077001
- (2009) J. Micromech. Microeng. , vol.19 , pp. 077001
- Vulto, P.¹ Huesgen, T.² Albrecht, B.³ Urban, G.A.⁴

126
- 34249037101
- T. Ito, T. Kawaguchi, H. Miyoshi, K. Maruyama, S. Kaneko, and S. Ohya J. Micromech. Microeng. 17 2007 432 438
- (2007) J. Micromech. Microeng. , vol.17 , pp. 432-438
- Ito, T.¹ Kawaguchi, T.² Miyoshi, H.³ Maruyama, K.⁴ Kaneko, S.⁵ Ohya, S.⁶

127
- 64649098963
- S. Zhao, H. Cong, and T. Pan Lab Chip 9 2009 1128 1132
- (2009) Lab Chip , vol.9 , pp. 1128-1132
- Zhao, S.¹ Cong, H.² Pan, T.³

128
- 80052222352
- N. Wangler, L. Gutzweiler, K. Kalkandjiev, C. Müller, F. Mayenfels, and H. Reinecke J. Micromech. Microeng. 21 2011 095009
- (2011) J. Micromech. Microeng. , vol.21 , pp. 095009
- Wangler, N.¹ Gutzweiler, L.² Kalkandjiev, K.³ Müller, C.⁴ Mayenfels, F.⁵ Reinecke, H.⁶

129
- 79551700861
- K. Kalkandjiev, L. Riegger, D. Kosse, M. Welsche, L. Gutzweiler, and R. Zengerle J. Micromech. Microeng. 21 2011 025008
- (2011) J. Micromech. Microeng. , vol.21 , pp. 025008
- Kalkandjiev, K.¹ Riegger, L.² Kosse, D.³ Welsche, M.⁴ Gutzweiler, L.⁵ Zengerle, R.⁶

130
- 84867560899
- Y. Temiz, A. Ferretti, Y. Leblebici, and C. Guiducci Lab Chip 12 2012 4920 4928
- (2012) Lab Chip , vol.12 , pp. 4920-4928
- Temiz, Y.¹ Ferretti, A.² Leblebici, Y.³ Guiducci, C.⁴

131
- 84910088434
- (accessed 28.04.14)
- MX Series dry film photoresists (DuPont). < http://www2.dupont.com/WLP/en-US/products/mx/mx5000.html >, 2014 (accessed 28.04.14).
- (2014) MX Series Dry Film Photoresists (DuPont)

132
- 84910046757
- Engineered Materials Systems, Inc. (accessed 28.04.14)
- Engineered Materials Systems, Inc. < http://www.emsadhesives.com >, 2014 (accessed 28.04.14).
- (2014)

133
- 84910067678
- ElgaEurope s.r.l. (accessed 28.04.14)
- ElgaEurope s.r.l. < http://www.elgaeurope.it/en >, 2014 (accessed 28.04.14).
- (2014)

134
- 84910046756
- Tokyo Ohka Kogyo Co., Ltd. (TOK). (accessed 28.04.14)
- Tokyo Ohka Kogyo Co., Ltd. (TOK). < http://www.tok.co.jp/en >, 2014 (accessed 28.04.14).
- (2014)

135
- 84910067677
- DJ DevCorp. (accessed 28.04.14)
- DJ DevCorp. < http://www.djdevcorp.com >, 2014 (accessed 28.04.14).
- (2014)

136
- 29244476881
- D.A. Bartholomeusz, R.W. Boutte, and J.D. Andrade J. Microelectromech. Syst. 14 2005 1364 1374
- (2005) J. Microelectromech. Syst. , vol.14 , pp. 1364-1374
- Bartholomeusz, D.A.¹ Boutte, R.W.² Andrade, J.D.³

137
- 84879952929
- A.C. Glavan, R.V. Martinez, E.J. Maxwell, A.B. Subramaniam, R.M.D. Nunes, and S. Soh Lab Chip 13 2013 2922 2930
- (2013) Lab Chip , vol.13 , pp. 2922-2930
- Glavan, A.C.¹ Martinez, R.V.² Maxwell, E.J.³ Subramaniam, A.B.⁴ Nunes, R.M.D.⁵ Soh, S.⁶

138
- 84910038374
- G.A. Cooksey, and J. Atencia Lab Chip 2014
- (2014) Lab Chip
- Cooksey, G.A.¹ Atencia, J.²

139
- 84910025916
- Y. Temiz, J. Skorucak, E. Delamarche, in: SPIE MOEMS-MEMS, International Society for Optics and Photonics, 2014, p. 89760Y.
- (2014) SPIE MOEMS-MEMS, International Society for Optics and Photonics , pp. 89760Y
- Temiz, Y.¹ Skorucak, J.² Delamarche, E.³

140
- 84907709443
- Y. Temiz, and E. Delamarche J. Micromech. Microeng. 24 2014 097001
- (2014) J. Micromech. Microeng. , vol.24 , pp. 097001
- Temiz, Y.¹ Delamarche, E.²

141
- 0038545277
- D. Therriault, S.R. White, and J.A. Lewis Nat. Mater. 2 2003 265 271
- (2003) Nat. Mater. , vol.2 , pp. 265-271
- Therriault, D.¹ White, S.R.² Lewis, J.A.³

142
- 84895514154
- A.K. Au, W. Lee, and A. Folch Lab Chip 14 2014 1294 1301
- (2014) Lab Chip , vol.14 , pp. 1294-1301
- Au, A.K.¹ Lee, W.² Folch, A.³

143
- 84910067676
- (accessed 14.05.14)
- Nanoscribe GmbH. < http://www.nanoscribe.de >, 2014 (accessed 14.05.14).
- (2014)
- Nanoscribe GmbH¹

144
- 84910025915
- (accessed 14.05.14)
- FEMTOprint SA. < http://www.femtoprint.ch >, 2014 (accessed 14.05.14).
- (2014)
- FEMTOprint SA¹

145
- 84875851786
- O. Rahmanian, and D.L. DeVoe Lab Chip 13 2013 1102 1108
- (2013) Lab Chip , vol.13 , pp. 1102-1108
- Rahmanian, O.¹ Devoe, D.L.²

146
- 84910077486
- J. Lim, F. Maes, V. Taly, and J.-C. Baret Lab Chip 2014
- (2014) Lab Chip
- Lim, J.¹ Maes, F.² Taly, V.³ Baret, J.-C.⁴

147
- 0035442494
- D. Juncker, H. Schmid, A. Bernard, I. Caelen, B. Michel, and N. de Rooij J. Micromech. Microeng. 11 2001 532 541
- (2001) J. Micromech. Microeng. , vol.11 , pp. 532-541
- Juncker, D.¹ Schmid, H.² Bernard, A.³ Caelen, I.⁴ Michel, B.⁵ De Rooij, N.⁶

148
- 64649092134
- E. Tkachenko, E. Gutierrez, M.H. Ginsberg, and A. Groisman Lab Chip 9 2009 1085 1095
- (2009) Lab Chip , vol.9 , pp. 1085-1095
- Tkachenko, E.¹ Gutierrez, E.² Ginsberg, M.H.³ Groisman, A.⁴

149
- 79960064171
- A. Lamberti, A. Sacco, S. Bianco, E. Giuri, M. Quaglio, and A. Chiodoni Microelectron. Eng. 88 2011 2308 2310
- (2011) Microelectron. Eng. , vol.88 , pp. 2308-2310
- Lamberti, A.¹ Sacco, A.² Bianco, S.³ Giuri, E.⁴ Quaglio, M.⁵ Chiodoni, A.⁶

150
- 84875801342
- C.S. Thompson, and A.R. Abate Lab Chip 13 2013 632 635
- (2013) Lab Chip , vol.13 , pp. 632-635
- Thompson, C.S.¹ Abate, A.R.²

151
- 77956306767
- X. Gong, X. Yi, K. Xiao, S. Li, R. Kodzius, and J. Qin Lab Chip 10 2010 2622 2627
- (2010) Lab Chip , vol.10 , pp. 2622-2627
- Gong, X.¹ Yi, X.² Xiao, K.³ Li, S.⁴ Kodzius, R.⁵ Qin, J.⁶

152
- 84869403284
- F. Bianco, N. Tonna, R.D. Lovchik, R. Mastrangelo, R. Morini, and A. Ruiz Anal. Chem. 84 2012 9833 9840
- (2012) Anal. Chem. , vol.84 , pp. 9833-9840
- Bianco, F.¹ Tonna, N.² Lovchik, R.D.³ Mastrangelo, R.⁴ Morini, R.⁵ Ruiz, A.⁶

153
- 60849126424
- M. Abdelgawad, and A.R. Wheeler Adv. Mater. 21 2009 920 925
- (2009) Adv. Mater. , vol.21 , pp. 920-925
- Abdelgawad, M.¹ Wheeler, A.R.²

154
- 84878983915
- J. Feng, and J.P. Rothstein J. Colloid Interface Sci. 404 2013 169 178
- (2013) J. Colloid Interface Sci. , vol.404 , pp. 169-178
- Feng, J.¹ Rothstein, J.P.²

155
- 84910026513
- A. Ghosh, R. Ganguly, T.M. Schutzius, and C.M. Megaridis Lab Chip 2014
- (2014) Lab Chip
- Ghosh, A.¹ Ganguly, R.² Schutzius, T.M.³ Megaridis, C.M.⁴

156
- 84890087085
- J. Hu, S. Wang, L. Wang, F. Li, B. Pingguan-Murphy, and T.J. Lu Biosens. Bioelectron. 54 2014 585 597
- (2014) Biosens. Bioelectron. , vol.54 , pp. 585-597
- Hu, J.¹ Wang, S.² Wang, L.³ Li, F.⁴ Pingguan-Murphy, B.⁵ Lu, T.J.⁶

157
- 77954619946
- H. Becker Lab Chip 10 2010 1894 1897
- (2010) Lab Chip , vol.10 , pp. 1894-1897
- Becker, H.¹

158
- 84857268612
- H. van Heeren Lab Chip 12 2012 1022 1025
- (2012) Lab Chip , vol.12 , pp. 1022-1025
- Van Heeren, H.¹

159
- 10644258136
- C.K. Fredrickson, and Z.H. Fan Lab Chip 4 2004 526 533
- (2004) Lab Chip , vol.4 , pp. 526-533
- Fredrickson, C.K.¹ Fan, Z.H.²

160
- 0037115520
- D. Juncker, H. Schmid, U. Drechsler, H. Wolf, M. Wolf, and B. Michel Anal. Chem. 74 2002 6139 6144
- (2002) Anal. Chem. , vol.74 , pp. 6139-6144
- Juncker, D.¹ Schmid, H.² Drechsler, U.³ Wolf, H.⁴ Wolf, M.⁵ Michel, B.⁶

161
- 32244435301
- T. Pan, A. Baldi, and B. Ziaie J. Microelectromech. Syst. 15 2006 267 272
- (2006) J. Microelectromech. Syst. , vol.15 , pp. 267-272
- Pan, T.¹ Baldi, A.² Ziaie, B.³

162
- 57449095839
- C.F. Chen, J. Liu, L.P. Hromada, C.W. Tsao, C.C. Chang, and D.L. DeVoe Lab Chip 9 2009 50 55
- (2009) Lab Chip , vol.9 , pp. 50-55
- Chen, C.F.¹ Liu, J.² Hromada, L.P.³ Tsao, C.W.⁴ Chang, C.C.⁵ Devoe, D.L.⁶

163
- 1842424988
- J.W. Hong, V. Studer, G. Hang, W.F. Anderson, and S.R. Quake Nat. Biotechnol. 22 2004 435 439
- (2004) Nat. Biotechnol. , vol.22 , pp. 435-439
- Hong, J.W.¹ Studer, V.² Hang, G.³ Anderson, W.F.⁴ Quake, S.R.⁵

164
- 24144463795
- A.M. Christensen, D.A. Chang-Yen, and B.K. Gale J. Micromech. Microeng. 15 2005 928 934
- (2005) J. Micromech. Microeng. , vol.15 , pp. 928-934
- Christensen, A.M.¹ Chang-Yen, D.A.² Gale, B.K.³

165
- 84890432445
- D.-H. Lee, and J.-K. Park Electrophoresis 34 2013 3119 3125
- (2013) Electrophoresis , vol.34 , pp. 3119-3125
- Lee, D.-H.¹ Park, J.-K.²

166
- 9644303044
- C.-H. Chiou, and G.-B. Lee J. Micromech. Microeng. 14 2004 1484 1490
- (2004) J. Micromech. Microeng. , vol.14 , pp. 1484-1490
- Chiou, C.-H.¹ Lee, G.-B.²

167
- 40949165356
- G. Perozziello, F. Bundgaard, and O. Geschke Sens. Actuators B Chem. 130 2008 947 953
- (2008) Sens. Actuators B Chem. , vol.130 , pp. 947-953
- Perozziello, G.¹ Bundgaard, F.² Geschke, O.³

168
- 79955796979
- R. Lo, and E. Meng J. Micromech. Microeng. 21 2011 054021
- (2011) J. Micromech. Microeng. , vol.21 , pp. 054021
- Lo, R.¹ Meng, E.²

169
- 84893047515
- M. Evander, and M. Tenje J. Micromech. Microeng. 24 2014 027003
- (2014) J. Micromech. Microeng. , vol.24 , pp. 027003
- Evander, M.¹ Tenje, M.²

170
- 84889047142
- D. van Swaay, J.-P. Mächler, C. Stanley, and A. DeMello Lab Chip 14 2014 178 181
- (2014) Lab Chip , vol.14 , pp. 178-181
- Van Swaay, D.¹ Mächler, J.-P.² Stanley, C.³ Demello, A.⁴

171
- 79551629835
- A. Chen, and T. Pan Lab Chip 11 2011 727 732
- (2011) Lab Chip , vol.11 , pp. 727-732
- Chen, A.¹ Pan, T.²

172
- 84877667574
- A. Scott, A.K. Au, E. Vinckenbosch, and A. Folch Lab Chip 13 2013 2036 2039
- (2013) Lab Chip , vol.13 , pp. 2036-2039
- Scott, A.¹ Au, A.K.² Vinckenbosch, E.³ Folch, A.⁴

173
- 33947576608
- D. Snakenborg, G. Perozziello, O. Geschke, and J.P. Kutter J. Micromech. Microeng. 17 2007 98 103
- (2007) J. Micromech. Microeng. , vol.17 , pp. 98-103
- Snakenborg, D.¹ Perozziello, G.² Geschke, O.³ Kutter, J.P.⁴

174
- 84910025914
- (accessed 28.04.14)
- CorSolutions. < http://www.mycorsolutions.com/products/probes.html >, 2014 (accessed 28.04.14).
- (2014) CorSolutions

175
- 0142060993
- Z. Yang, and R. Maeda J. Chromatogr. A 1013 2003 29 33
- (2003) J. Chromatogr. A , vol.1013 , pp. 29-33
- Yang, Z.¹ Maeda, R.²

176
- 33244456985
- V. Saarela, S. Franssila, S. Tuomikoski, S. Marttila, P. Östman, and T. Sikanen Sens. Actuators B Chem. 114 2006 552 557
- (2006) Sens. Actuators B Chem. , vol.114 , pp. 552-557
- Saarela, V.¹ Franssila, S.² Tuomikoski, S.³ Marttila, S.⁴ Östman, P.⁵ Sikanen, T.⁶

177
- 61849089409
- D. Sabourin, D. Snakenborg, and M. Dufva J. Micromech. Microeng. 19 2009 035021
- (2009) J. Micromech. Microeng. , vol.19 , pp. 035021
- Sabourin, D.¹ Snakenborg, D.² Dufva, M.³

178
- 85049416130
- V. Nittis, R. Fortt, C.H. Legge, and A.J. de Mello Lab Chip 1 2001 148
- (2001) Lab Chip , vol.1 , pp. 148
- Nittis, V.¹ Fortt, R.² Legge, C.H.³ De Mello, A.J.⁴

179
- 65349086706
- G.A. Cooksey, A.L. Plant, and J. Atencia Lab Chip 9 2009 1298 1300
- (2009) Lab Chip , vol.9 , pp. 1298-1300
- Cooksey, G.A.¹ Plant, A.L.² Atencia, J.³

180
- 29344437526
- K.-H. Han, and A.B. Frazier IEEE Trans. Device Mater. Reliab. 5 2005 452 457
- (2005) IEEE Trans. Device Mater. Reliab. , vol.5 , pp. 452-457
- Han, K.-H.¹ Frazier, A.B.²

181
- 33947578286
- A.A.S. Bhagat, P. Jothimuthu, A. Pais, and I. Papautsky J. Micromech. Microeng. 17 2007 42
- (2007) J. Micromech. Microeng. , vol.17 , pp. 42
- Bhagat, A.A.S.¹ Jothimuthu, P.² Pais, A.³ Papautsky, I.⁴

182
- 65749118122
- H. Kortmann, L.M. Blank, and A. Schmid Lab Chip 9 2009 1455 1460
- (2009) Lab Chip , vol.9 , pp. 1455-1460
- Kortmann, H.¹ Blank, L.M.² Schmid, A.³

183
- 79955970523
- F.S.O. Fritzsch, H. Kortmann, J. Lonzynski, L.M. Blank, and A. Schmid Microfluid. Nanofluid. 10 2010 679 684
- (2010) Microfluid. Nanofluid. , vol.10 , pp. 679-684
- Fritzsch, F.S.O.¹ Kortmann, H.² Lonzynski, J.³ Blank, L.M.⁴ Schmid, A.⁵

184
- 84886080858
- E. Wilhelm, C. Neumann, T. Duttenhofer, L. Pires, and B.E. Rapp Lab Chip 13 2013 4343 4351
- (2013) Lab Chip , vol.13 , pp. 4343-4351
- Wilhelm, E.¹ Neumann, C.² Duttenhofer, T.³ Pires, L.⁴ Rapp, B.E.⁵

185
- 73149117783
- J. Atencia, G.A. Cooksey, A. Jahn, J.M. Zook, W.N. Vreeland, and L.E. Locascio Lab Chip 10 2010 246 249
- (2010) Lab Chip , vol.10 , pp. 246-249
- Atencia, J.¹ Cooksey, G.A.² Jahn, A.³ Zook, J.M.⁴ Vreeland, W.N.⁵ Locascio, L.E.⁶

186
- 84910067675
- QuickConnect (SFC Fluidics LLC) (accessed 28.04.14)
- QuickConnect (SFC Fluidics LLC). < http://www.sfc-fluidics.com/products/quickconnect >, 2014 (accessed 28.04.14).
- (2014)

187
- 84910067674
- NanoPorts (IDEX Health and Science) (accessed 28.04.14)
- NanoPorts (IDEX Health and Science). < http://www.idex-hs.com/products/2562/NanoPorts.aspx?ProductTypeID=57&ProductFamilyID=3 >, 2014 (accessed 28.04.14).
- (2014)

188
- 0032814992
- N.H. Bings, C. Wang, C.D. Skinner, C.L. Colyer, P. Thibault, and D.J. Harrison Anal. Chem. 71 1999 3292 3296
- (1999) Anal. Chem. , vol.71 , pp. 3292-3296
- Bings, N.H.¹ Wang, C.² Skinner, C.D.³ Colyer, C.L.⁴ Thibault, P.⁵ Harrison, D.J.⁶

189
- 0034832605
- E. Meng, S. Wu, and Y.-C. Tai Fresenius J. Anal. Chem. 371 2001 270 275
- (2001) Fresenius J. Anal. Chem. , vol.371 , pp. 270-275
- Meng, E.¹ Wu, S.² Tai, Y.-C.³

190
- 0037342608
- A.V. Pattekar, and M.V. Kothare J. Micromech. Microeng. 13 2003 337 345
- (2003) J. Micromech. Microeng. , vol.13 , pp. 337-345
- Pattekar, A.V.¹ Kothare, M.V.²

191
- 34248345541
- R.M. Tiggelaar, F. Benito-López, D.C. Hermes, H. Rathgen, R.J.M. Egberink, and F.G. Mugele Chem. Eng. J. 131 2007 163 170
- (2007) Chem. Eng. J. , vol.131 , pp. 163-170
- Tiggelaar, R.M.¹ Benito-López, F.² Hermes, D.C.³ Rathgen, H.⁴ Egberink, R.J.M.⁵ Mugele, F.G.⁶

192
- 34748856709
- E.R. Murphy, T. Inoue, H.R. Sahoo, N. Zaborenko, and K.F. Jensen Lab Chip 7 2007 1309 1314
- (2007) Lab Chip , vol.7 , pp. 1309-1314
- Murphy, E.R.¹ Inoue, T.² Sahoo, H.R.³ Zaborenko, N.⁴ Jensen, K.F.⁵

193
- 41249085386
- D.M. Hartmann, J.T. Nevill, K.I. Pettigrew, G. Votaw, P.-J. Kung, and H.C. Crenshaw Lab Chip 8 2008 609 616
- (2008) Lab Chip , vol.8 , pp. 609-616
- Hartmann, D.M.¹ Nevill, J.T.² Pettigrew, K.I.³ Votaw, G.⁴ Kung, P.-J.⁵ Crenshaw, H.C.⁶

194
- 79952918846
- D.G. Johnson, R.D. Frisina, and D.A. Borkholder IEEE Trans. Biomed. Eng. 58 2011 943 948
- (2011) IEEE Trans. Biomed. Eng. , vol.58 , pp. 943-948
- Johnson, D.G.¹ Frisina, R.D.² Borkholder, D.A.³

195
- 84910025913
- US 2013/0098481 A1
- R.D. Lovchik, G. V Kaigala, E. Delamarche, Microfluidic device with interconnects, US 2013/0098481 A1, 2013.
- (2013) Microfluidic Device with Interconnects
- Lovchik, R.D.¹ Kaigala, G.V.² Delamarche, E.³

196
- 0141958841
- H. Chen, D. Acharya, A. Gajraj, and J.-C. Meiners Anal. Chem. 75 2003 5287 5291
- (2003) Anal. Chem. , vol.75 , pp. 5287-5291
- Chen, H.¹ Acharya, D.² Gajraj, A.³ Meiners, J.-C.⁴

197
- 0142227244
- Shifeng. Li, and Shaochen. Chen IEEE Trans. Adv. Packag. 26 2003 242 247
- (2003) IEEE Trans. Adv. Packag , vol.26 , pp. 242-247
- Li Shifeng¹ Chen Shaochen²

198
- 84910078677
- C.J. Mu, Z.Y. Zhang, M. Lin, and X.C. Cao Microsyst. Technol. 2013 1 8
- (2013) Microsyst. Technol. , pp. 1-8
- Mu, C.J.¹ Zhang, Z.Y.² Lin, M.³ Cao, X.C.⁴

199
- 85017006462
- J. Wang, W. Chen, J. Sun, C. Liu, Q. Yin, and L. Zhang Lab Chip 2014
- (2014) Lab Chip
- Wang, J.¹ Chen, W.² Sun, J.³ Liu, C.⁴ Yin, Q.⁵ Zhang, L.⁶

200
- 33750990470
- D.A. Mair, E. Geiger, A.P. Pisano, J.M.J. Frechet, and F. Svec Lab Chip 6 2006 1346
- (2006) Lab Chip , vol.6 , pp. 1346
- Mair, D.A.¹ Geiger, E.² Pisano, A.P.³ Frechet, J.M.J.⁴ Svec, F.⁵

201
- 84861526951
- H. Chang, F. Zhang, J. Ding, F. Chen, S. Hong, and M. Kraft Microsyst. Technol. 18 2012 723 730
- (2012) Microsyst. Technol. , vol.18 , pp. 723-730
- Chang, H.¹ Zhang, F.² Ding, J.³ Chen, F.⁴ Hong, S.⁵ Kraft, M.⁶

202
- 84878044313
- A. Waldbaur, J. Kittelmann, C.P. Radtke, J. Hubbuch, and B.E. Rapp Lab Chip 13 2013 2337 2343
- (2013) Lab Chip , vol.13 , pp. 2337-2343
- Waldbaur, A.¹ Kittelmann, J.² Radtke, C.P.³ Hubbuch, J.⁴ Rapp, B.E.⁵

203
- 84884543046
- C. Errando-Herranz, F. Saharil, A.M. Romero, N. Sandstrom, R.Z. Shafagh, W. van der Wijngaart, et al., in: 2013 Transducers Eurosensors XXVII 17th Int. Conf. Solid-State Sensors, Actuators Microsystems (TRANSDUCERS EUROSENSORS XXVII), IEEE, 2013, pp. 1613-1616.
- (2013) 2013 Transducers Eurosensors XXVII 17th Int. Conf. Solid-State Sensors, Actuators Microsystems (TRANSDUCERS EUROSENSORS XXVII), IEEE , pp. 1613-1616
- Errando-Herranz, C.¹ Saharil, F.² Romero, A.M.³ Sandstrom, N.⁴ Shafagh, R.Z.⁵ Wijngaart Der W.Van⁶

204
- 67349256891
- S.H. Ng, Z.F. Wang, and N.F. de Rooij Microelectron. Eng. 86 2009 1354 1357
- (2009) Microelectron. Eng. , vol.86 , pp. 1354-1357
- Ng, S.H.¹ Wang, Z.F.² De Rooij, N.F.³

205
- 77749333244
- D. Sabourin, M. Dufva, T. Jensen, J. Kutter, and D. Snakenborg J. Micromech. Microeng. 20 2010 037001
- (2010) J. Micromech. Microeng. , vol.20 , pp. 037001
- Sabourin, D.¹ Dufva, M.² Jensen, T.³ Kutter, J.⁴ Snakenborg, D.⁵

206
- 0036152932
- A. Puntambekar, and C.H. Ahn J. Micromech. Microeng. 12 2002 35 40
- (2002) J. Micromech. Microeng. , vol.12 , pp. 35-40
- Puntambekar, A.¹ Ahn, C.H.²

207
- 84890282745
- O.H. Paydar, C.N. Paredes, Y. Hwang, J. Paz, N.B. Shah, and R.N. Candler Sens. Actuators A Phys. 205 2014 199 203
- (2014) Sens. Actuators A Phys. , vol.205 , pp. 199-203
- Paydar, O.H.¹ Paredes, C.N.² Hwang, Y.³ Paz, J.⁴ Shah, N.B.⁵ Candler, R.N.⁶

208
- 84892988650
- M.B. Dentry, J.R. Friend, and L.Y. Yeo Lab Chip 14 2014 750 758
- (2014) Lab Chip , vol.14 , pp. 750-758
- Dentry, M.B.¹ Friend, J.R.² Yeo, L.Y.³

209
- 84910039509
- (accessed 28.04.14)
- Micronit Microfluidics. < http://www.micronit.com >, 2014 (accessed 28.04.14).
- (2014) Micronit Microfluidics

210
- 84910025912
- (accessed 28.04.14)
- microLIQUID. < http://www.microliquid.com >, 2014 (accessed 28.04.14).
- (2014) MicroLIQUID

211
- 84910046755
- HSEC8 Edge Card Connector (SAMTEC) (accessed 28.04.14)
- HSEC8 Edge Card Connector (SAMTEC). < https://www.samtec.com/connectors/edge-card-micro-backplane/high-speed-card-systems/high-speed-edge-card.aspx >, 2014 (accessed 28.04.14).
- (2014)

212
- 84887426373
- V. Balasubramanian, P.-F. Ruedi, Y. Temiz, A. Ferretti, and C. Guiducci IEEE Trans. Biomed. Circuits Syst. 7 2013 660 673
- (2013) IEEE Trans. Biomed. Circuits Syst. , vol.7 , pp. 660-673
- Balasubramanian, V.¹ Ruedi, P.-F.² Temiz, Y.³ Ferretti, A.⁴ Guiducci, C.⁵

213
- 78649730614
- K. Misiakos, P.S. Petrou, S.E. Kakabakos, D. Yannoukakos, H. Contopanagos, and T. Knoll Biosens. Bioelectron. 26 2010 1528 1535
- (2010) Biosens. Bioelectron. , vol.26 , pp. 1528-1535
- Misiakos, K.¹ Petrou, P.S.² Kakabakos, S.E.³ Yannoukakos, D.⁴ Contopanagos, H.⁵ Knoll, T.⁶

214
- 79960067339
- C. Wu, F. Bendriaa, F. Brunelle, and V. Senez Microelectron. Eng. 88 2011 1878 1883
- (2011) Microelectron. Eng. , vol.88 , pp. 1878-1883
- Wu, C.¹ Bendriaa, F.² Brunelle, F.³ Senez, V.⁴

215
- 84896811878
- P. Novo, V. Chu, and J.P. Conde Biosens. Bioelectron. 57C 2014 284 291
- (2014) Biosens. Bioelectron. , vol.57 C , pp. 284-291
- Novo, P.¹ Chu, V.² Conde, J.P.³

216
- 78049279337
- Z. Nie, F. Deiss, X. Liu, O. Akbulut, and G.M. Whitesides Lab Chip 10 2010 3163 3169
- (2010) Lab Chip , vol.10 , pp. 3163-3169
- Nie, Z.¹ Deiss, F.² Liu, X.³ Akbulut, O.⁴ Whitesides, G.M.⁵

217
- 84910067672
- Interconnect Devices, Inc. (accessed 28.04.14)
- Interconnect Devices, Inc. < http://www.idinet.com/Home >, 2014 (accessed 28.04.14).
- (2014)

218
- 84910088433
- (accessed 28.04.14)
- PRECI-DIP SA. < http://www.precidip.com >, 2014 (accessed 28.04.14).
- (2014)
- PRECI-DIP SA¹

219
- 84910067671
- Fixtest Pruefmittelbau GmbH (accessed 08.05.14)
- Fixtest Pruefmittelbau GmbH. < http://www.fixtest.de/en/products/spring-contact-probes/fine-pitch-contacts/ >, 2014 (accessed 08.05.14).
- (2014)

220
- 84910088179
- Emulation Technology, Inc. (accessed 08.05.14)
- Emulation Technology, Inc. < http://www.emulation.com/catalog/pogo/ >, 2014 (accessed 08.05.14).
- (2014)

221
- 84910046533
- E-tec Interconnect Ltd. (accessed 14.05.14)
- E-tec Interconnect Ltd. < http://www.e-tec.ch/v3/ >, 2014 (accessed 14.05.14).
- (2014)

222
- 84910067449
- (accessed 28.04.14)
- OMRON Launches Mass Production of a New Probe Pin for Inspection of High-density ICs. < http://www.omron.com/media/press/2013/07/e0701.html >, 2014 (accessed 28.04.14).
- (2014) OMRON Launches Mass Production of A New Probe Pin for Inspection of High-density ICs.

223
- 33750993169
- J.J. Park, X. Luo, H. Yi, T.M. Valentine, G.F. Payne, and W.E. Bentley Lab Chip 6 2006 1315 1321
- (2006) Lab Chip , vol.6 , pp. 1315-1321
- Park, J.J.¹ Luo, X.² Yi, H.³ Valentine, T.M.⁴ Payne, G.F.⁵ Bentley, W.E.⁶

224
- 77951898558
- X. Illa, O. Ordeig, D. Snakenborg, A. Romano-Rodríguez, R.G. Compton, and J.P. Kutter Lab Chip 10 2010 1254 1261
- (2010) Lab Chip , vol.10 , pp. 1254-1261
- Illa, X.¹ Ordeig, O.² Snakenborg, D.³ Romano-Rodríguez, A.⁴ Compton, R.G.⁵ Kutter, J.P.⁶

225
- 41149118562
- J. Do, and C.H. Ahn Lab Chip 8 2008 542 549
- (2008) Lab Chip , vol.8 , pp. 542-549
- Do, J.¹ Ahn, C.H.²

226
- 34249033709
- T.T. Kanagasabapathi, and K.V.I.S. Kaler J. Micromech. Microeng. 17 2007 743 752
- (2007) J. Micromech. Microeng. , vol.17 , pp. 743-752
- Kanagasabapathi, T.T.¹ Kaler, K.V.I.S.²

227
- 84877966511
- R. Fobel, C. Fobel, and A.R. Wheeler Appl. Phys. Lett. 102 2013 193513
- (2013) Appl. Phys. Lett. , vol.102 , pp. 193513
- Fobel, R.¹ Fobel, C.² Wheeler, A.R.³

228
- 84886891601
- K. Choi, A.H.C. Ng, R. Fobel, D.A. Chang-Yen, L.E. Yarnell, and E.L. Pearson Anal. Chem. 85 2013 9638 9646
- (2013) Anal. Chem. , vol.85 , pp. 9638-9646
- Choi, K.¹ Ng, A.H.C.² Fobel, R.³ Chang-Yen, D.A.⁴ Yarnell, L.E.⁵ Pearson, E.L.⁶

229
- 0033533260
- J. Bausells, J. Carrabina, A. Errachid, and A. Merlos Sens. Actuators B Chem. 57 1999 56 62
- (1999) Sens. Actuators B Chem. , vol.57 , pp. 56-62
- Bausells, J.¹ Carrabina, J.² Errachid, A.³ Merlos, A.⁴

230
- 9144251670
- B. Eversmann, M. Jenkner, F. Hofmann, C. Paulus, R. Brederlow, and B. Holzapfl IEEE J. Solid-State Circuits 38 2003 2306 2317
- (2003) IEEE J. Solid-State Circuits , vol.38 , pp. 2306-2317
- Eversmann, B.¹ Jenkner, M.² Hofmann, F.³ Paulus, C.⁴ Brederlow, R.⁵ Holzapfl, B.⁶

231
- 1042287246
- C. Guiducci, C. Stagni, G. Zuccheri, A. Bogliolo, L. Benini, and B. Samorì Biosens. Bioelectron. 19 2004 781 787
- (2004) Biosens. Bioelectron. , vol.19 , pp. 781-787
- Guiducci, C.¹ Stagni, C.² Zuccheri, G.³ Bogliolo, A.⁴ Benini, L.⁵ Samorì, B.⁶

232
- 33847335094
- E. Ghafar-Zadeh, M. Sawan, and D. Therriault Sens. Actuators A Phys. 134 2007 27 36
- (2007) Sens. Actuators A Phys. , vol.134 , pp. 27-36
- Ghafar-Zadeh, E.¹ Sawan, M.² Therriault, D.³

233
- 0036646553
- D. Lange, C. Hagleitner, A. Hierlemann, O. Brand, and H. Baltes Anal. Chem. 74 2002 3084 3095
- (2002) Anal. Chem. , vol.74 , pp. 3084-3095
- Lange, D.¹ Hagleitner, C.² Hierlemann, A.³ Brand, O.⁴ Baltes, H.⁵

234
- 69149095892
- Wiley
- H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J.G. Korvink, and O. Tabata Enabling Technologies for MEMS and Nanodevices vol. 1 2004 Wiley
- (2004) Enabling Technologies for MEMS and Nanodevices , vol.1 VOL.
- Baltes, H.¹ Brand, O.² Fedder, G.K.³ Hierold, C.⁴ Korvink, J.G.⁵ Tabata, O.⁶

235
- 80053506908
- A. Uddin, K. Milaninia, C.-H. Chen, and L. Theogarajan IEEE Trans. Compon. Packag. Manuf. Technol. 1 2011 1996 2004
- (2011) IEEE Trans. Compon. Packag. Manuf. Technol. , vol.1 , pp. 1996-2004
- Uddin, A.¹ Milaninia, K.² Chen, C.-H.³ Theogarajan, L.⁴

236
- 84910102835
- E. Smela, T. Datta-Chaudhuri, and P. Abshire Lab Chip 2014
- (2014) Lab Chip
- Smela, E.¹ Datta-Chaudhuri, T.² Abshire, P.³

237
- 84910088178
- i-STAT System (Abbott Point of Care) (accessed 28.04.14)
- i-STAT System (Abbott Point of Care). < https://www.abbottpointofcare.com >, 2014 (accessed 28.04.14).
- (2014)

238
- 84910025553
- Ion Torrent (Life Technologies Corporation) (accessed 28.04.14)
- Ion Torrent (Life Technologies Corporation). < http://ioncommunity.lifetechnologies.com/welcome >, 2014 (accessed 28.04.14).
- (2014)

239
- 84555220507
- Y. Temiz, S. Kilchenmann, Y. Leblebici, and C. Guiducci Electron. Lett. 47 2011 S22
- (2011) Electron. Lett. , vol.47 , pp. 22
- Temiz, Y.¹ Kilchenmann, S.² Leblebici, Y.³ Guiducci, C.⁴

240
- 84910046532
- M-135
- Y. Temiz, and C. Guiducci Trans. Jpn. Soc. Med. Biol. Eng. 51 2013 M-135
- (2013) Trans. Jpn. Soc. Med. Biol. Eng. , vol.51
- Temiz, Y.¹ Guiducci, C.²

241
- 67349097407
- S. Moon, H.O. Keles, A. Ozcan, A. Khademhosseini, E. Haeggstrom, and D. Kuritzkes Biosens. Bioelectron. 24 2009 3208 3214
- (2009) Biosens. Bioelectron. , vol.24 , pp. 3208-3214
- Moon, S.¹ Keles, H.O.² Ozcan, A.³ Khademhosseini, A.⁴ Haeggstrom, E.⁵ Kuritzkes, D.⁶

242
- 79952140070
- W. Qiao, G. Cho, and Y.-H. Lo Lab Chip 11 2011 1074 1080
- (2011) Lab Chip , vol.11 , pp. 1074-1080
- Qiao, W.¹ Cho, G.² Lo, Y.-H.³

243
- 84894257087
- C. Peng, Z. Zhang, C.-J.C. Kim, and Y.S. Ju Lab Chip 14 2014 1117 1122
- (2014) Lab Chip , vol.14 , pp. 1117-1122
- Peng, C.¹ Zhang, Z.² Kim, C.-J.C.³ Ju, Y.S.⁴

244
- 84864263729
- S. Cheng, and Z. Wu Lab Chip 12 2012 2782 2791
- (2012) Lab Chip , vol.12 , pp. 2782-2791
- Cheng, S.¹ Wu, Z.²

245
- 84910088177
- B. Zhang, Q. Dong, C.E. Korman, Z. Li, and M.E. Zaghloul Sci. Rep. 3 2013
- (2013) Sci. Rep. , vol.3
- Zhang, B.¹ Dong, Q.² Korman, C.E.³ Li, Z.⁴ Zaghloul, M.E.⁵

246
- 84899884539
- (accepted)
- M. Gao, L. Gui, A handy liquid-metal based electroosmotic flow pump, Lab Chip. (2014) (accepted).
- (2014) A Handy Liquid-metal Based Electroosmotic Flow Pump, Lab Chip.
- Gao, M.¹ Gui, L.²

247
- 84891309209
- Wiley
- G. Philip, C. Bower, and P. Ramm Handbook of 3D Integration: Volumes 1 and 2 - Technology and Applications of 3D Integrated Circuits 2012 Wiley
- (2012) Handbook of 3D Integration: Volumes 1 and 2 - Technology and Applications of 3D Integrated Circuits
- Philip, G.¹ Bower, C.² Ramm, P.³

248
- 54049110736
- T. Brunschwiler, B. Michel, H. Rothuizen, U. Kloter, B. Wunderle, and H. Oppermann Microsyst. Technol. 15 2008 57 74
- (2008) Microsyst. Technol. , vol.15 , pp. 57-74
- Brunschwiler, T.¹ Michel, B.² Rothuizen, H.³ Kloter, U.⁴ Wunderle, B.⁵ Oppermann, H.⁶

249
- 84887935528
- Y. Zhang, A. Dembla, and M.S. Bakir IEEE Trans. Compon. Packag. Manuf. Technol. 3 2013 1842 1850
- (2013) IEEE Trans. Compon. Packag. Manuf. Technol. , vol.3 , pp. 1842-1850
- Zhang, Y.¹ Dembla, A.² Bakir, M.S.³

250
- 81555212598
- P. Ruch, T. Brunschwiler, W. Escher, S. Paredes, and B. Michel IBM J. Res. Dev. 55 2011 15:1 15:13
- (2011) IBM J. Res. Dev. , vol.55 , pp. 151-1513
- Ruch, P.¹ Brunschwiler, T.² Escher, W.³ Paredes, S.⁴ Michel, B.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.