'Chip-olate' and dry-film resists for efficient fabrication, singulation and sealing of microfluidic chips

Journal of Micromechanics and Microengineering

Volumn 24, Issue 9, 2014, Pages

  Temiz, Yuksel ^a   Delamarche, Emmanuel ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

capillary driven flow; dry film resist; immunoassay; microfluidics; wafer dicing

Indexed keywords

CAPILLARY-DRIVEN FLOWS; DRY-FILM RESIST; IMMUNOASSAY; MICROFLUIDIC CHIP; SINGULATION; WAFER DICING;

MICROFLUIDICS;

EID: 84907709443     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/24/9/097001     Document Type: Article

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