Microfluidics in silicon/polymer technology as a cost-efficient alternative to silicon/glass

Journal of Micromechanics and Microengineering

Volumn 21, Issue 2, 2011, Pages

  Kalkandjiev, K ^a   Riegger, L ^b   Kosse, D ^c   Welsche, M ^a   Gutzweiler, L ^a   Zengerle, R ^a   Koltay, P ^a,b  

^a UNIVERSITY OF FREIBURG   (Germany)

^b BIOFLUIDIX GMBH   (Germany)

^c Institute for Micromachining and Information Technology   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE BONDING; ANODIC BONDING; AUTOFLUORESCENCE; CHIP INTERFACES; COST EFFICIENCY; COST-EFFICIENT; CYCLIC OLEFIN COPOLYMERS; CYTOTOXIC EFFECTS; HIGH-DENSITY; ISO 10993; LEAK TIGHTNESS; LOW TEMPERATURES; LOWER COST; MACHINE TIME; NANOLITER DISPENSERS; PYREX WAFERS; SILICON MICROCHANNELS; SURFACE INHOMOGENEITIES; UV LITHOGRAPHY;

COSTS; GLASS; MICROCHANNELS; MICROFLUIDICS; OLEFINS; ORGANIC POLYMERS; SILICON WAFERS;

GLASS BONDING;

EID: 79551700861     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/2/025008     Document Type: Article

References (51)

1. Haeberle S and Zengerle R 2007 Microfluidic platf (Pubitemid 47295976)
2. Mark D, Haeberle S, Roth G, von Stetten F and Zengerle R 2010 Microfluidic lab-on-a-chip platforms: requirements, characteristics and applications Chem. Soc. Rev. 39 1153-82
3. Blow N 2009 Microfluidics: the great divide Nat. Methods 6 682-6
4. Whitesides G M 2006 The origins and the future of microfluidics Nature 442 368-73 (Pubitemid 44264779)
5. Becker H 2009 It's the economy... Lab Chip 9 2759-62
6. Yole Développement S A 2009 Emerging Markets for Microfluidics Applications Report (EMMA 2009)
7. Lorenz H, Despont M, Fahrni N, LaBianca N, Renaud P and Vettiger P 1997 SU-8: a low-cost negative resist for MEMS J. Micromech. Microeng. 7 121-4 (Pubitemid 127607057)
8. Abgrall P, Conedera V, Camon H, Gue A M and Nguyen N T 2007 SU-8 as a structural material for labs-on-chips and microelectromechanical systems Electrophoresis 28 4539-51
9. Bohl B, Steger R, Zengerle R and Koltay P 2005 Multi-layer SU-8 lift-off technology for microfluidic devices J. Micromech. Microeng. 15 1125-30 (Pubitemid 40673096)
10. Anderson J R, Chiu D T, Jackman R J, Cherniavskaya O, McDonald J C, Wu H, Whitesides S H and Whitesides G M 2000 Fabrication of topologically complex three-dimensional microfluidic systems in PDMS by rapid prototyping Anal. Chem. 72 3158-64 (Pubitemid 30482485)
11. Duffy D C, McDonald J C, Schueller O J A and Whitesides G M 1998 Rapid prototyping of microfluidic systems in poly (dimethylsiloxane) Anal. Chem. 70 4974-84
12. Attia U M, Marson S and Alcock J R 2009 Micro-injection moulding of polymer microfluidic devices Microfluidics Nanofluidics 7 1-28
13. Heckele M and Schomburg W K 2004 Review on micro molding of thermoplastic polymers J. Micromech. Microeng. 14 R1-14
14. Focke M, Kosse D, Müller C, Reinecke H, Zengerle R and von Stetten F 2010 Lab-on-a-foil: microfluidics on thin and flexible films Lab Chip 10 1365-86
15. Velten T, Schuck H, Richter M, Klink G, Bock K, Malek C K, Roth S, Scho H and Bolt P J 2008 Microfluidics on foil: state of the art and new developments Proc. Inst. Mech. Eng. B 222 107-16
16. Jang L S, Li Y J, Lin S J, Hsu Y C, Yao W S, Tsai M C and Hou C C 2007 A stand-alone peristaltic micropump based on piezoelectric actuation Biomed. Microdevices 9 185-94
17. Lopez-Martinez M J, Campo E M, Caballero D, Fernandez E, Errachid A, Esteve J and Plaza J A 2009 Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications J. Micromech. Microeng. 19 105013-22
18. Gast F-U and Fiehn H 2003 The development of integrated microfluidic systems at GeSiM Lab Chip 3 6N-10N
19. ® Vario: a novel microarrayer system for highly flexible and highly parallel picoliter dispensing Biomed. Microdevices 11 755-61
20. Trachsel F, Hutter C and von Rohr P R 2008 Transparent silicon/glass microreactor for high-pressure and high-temperature reactions Chem. Eng. J. 135 (Suppl. 1) S309-16 (Pubitemid 350088600)
21. Chevallier J and Ayela F 2008 Microfluidic on chip viscosimeters Rev. Sci. Instrum. 79 7
22. Schafer D, Gibson E A, Salim E A, Palmer A E, Jimenez R and Squier J 2009 Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding Opt. Express 17 6068-73
23. Silicon/Glass Microfluidic Foundries http://www.micralyne.com/http://www. micronit.com/http://www.lionixbv. nl
24. Verpoorte E and de Rooij N F 2003 Microfluidics meets MEMS Proc. IEEE 91 930-53
25. Velten T, Ruf H H, Barrow D, Aspragathos N, Lazarou P, Jung E, Malek C K, Richter M and Kruckow J 2005 Packaging of bio-MEMS: strategies, technologies, and applications IEEE Trans. Adv. Packag. 28 533-46 (Pubitemid 41723913)
26. Howlader M M R, Suehara S, Takagi H, Kim T H, Maeda R and Suga T 2006 Room-temperature microfluidics packaging using sequential plasma activation process IEEE Trans. Adv. Packag. 29 448-56 (Pubitemid 44263686)
27. Ghafar-Zadeh E, Sawan M and Therriault D 2009 A microfluidic packaging technique for lab-on-chip applications IEEE Trans. Adv. Packag. 32 410-6
28. Lu C M, Lee L J and Juang Y J 2008 Packaging of microfluidic chips via interstitial bonding Electrophoresis 29 1407-14 (Pubitemid 351524352)
29. Ducree J, Gruhler H, Hey N, Mueller M, Bekesi S, Freygang M, Sandmaier H and Zengerle R 2000 TopSpot-a new method for the fabrication of microarrays Proc. IEEE MEMS (Miyazaki, Japan) pp 317-22
30. Gutmann O, Niekrawietz R, Kuehlewein R, Steinert C P, Reinbold S, de Heij B, Daub M and Zengerle R 2004 Non-contact production of oligonucleotide microarrays using the highly integrated TopSpot nanoliter dispenser Analyst 129 835-40 (Pubitemid 39331525)
31. Gutmann O, Kuehlewein R, Reinbold S, Niekrawietz R, Steinert C P, de Heij B, Zengerle R and Daub M 2005 Fast and reliable protein microarray production by a new drop-in-drop technique Lab Chip 5 675-81 (Pubitemid 40863115)
32. Gutmann O, Wintermantel M K, Niekrawietz R, de Heij B, Zengerle R and Daub M 2005 Dispensing of cells for highly parallel production of living cell microarrays Proc. IEEE Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Seoul, Korea, 5-9 June 2005) pp 449-52 (Pubitemid 41538521)
33. Fredrickson C K and Fan Z H 2004 Macro-to-micro interfaces for microfluidic devices Lab Chip 4 526-33 (Pubitemid 39657902)
34. Kukharenka E, Farooqui M M, Grigore L, Kraft M and Hollinshead N 2003 Electroplating moulds using dry film thick negative photoresist J. Micromech. Microeng. 13 S67-74
35. Lorenz H, Paratte R, Luthier R, de Rooij N F and Renaud P 1996 Low-cost technology for multilayer electroplated parts using laminated dry film resist Sensors Actuators A 53 364-8 (Pubitemid 126359569)
36. Stöhr U 2009 Multilayer photoresist stamps for selective plasma treatment in micrometer scales Plasma Process. Polym. 6 228-33
37. Sandison M E and Morgan H 2005 Rapid fabrication of polymer microfluidic systems for the production of artificial lipid bilayers J. Micromech. Microeng. 15 S139-44 (Pubitemid 40872155)
38. Stephan K, Pittet P, Renaud L, Kleimann P, Morin P, Ouaini N and Ferrigno R 2007 Fast prototyping using a dry film photoresist: microfabrication of soft-lithography masters for microfluidic structures J. Micromech. Microeng. 17 N69-74 (Pubitemid 47469926)
39. Huesgen T, Lenk G, Albrecht B, Vulto P, Lemke T and Woias P 2010 Optimization and characterization of waferlevel adhesive bonding with patterned dry-film photoresist for 3D MEMS integration Sensors Actuators A 162 137-44
40. Vulto P, Huesgen T, Albrecht B and Urban G A 2009 A full-wafer fabrication process for glass microfluidic chips with integrated electroplated electrodes by direct bonding of dry film resist J. Micromech. Microeng. 17 077001
41. Courbat J, Briand J and de Rooij N F 2010 Foil level packaging of a chemical gas sensor J. Micromech. Microeng. 20 055032
42. Aljada M and Asthana A 2010 Fabrication of multilayer microstructures using dry film resist and deep reactive ion etcher Micro Nano Lett. 5 121-4
43. Heuschkel M O, Guerin L, Buisson B, Bertrand D and Renaud P 1998 Buried microchannels in photopolymer for delivering of solutions to neurons in a network Sensors Actuators B 48 356-61 (Pubitemid 128443195)
44. Abgrall P, Lattes C, Conederal V, Dollat X, Colin S and Gue A M 2006 A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films J. Micromech. Microeng. 16 113-21 (Pubitemid 41818032)
45. Vulto P, Glade N, Altomare L, Bablet J, Del Tin L, Medoro G, Chartier I, Manaresi N, Tartagni M and Guerrieria R 2004 Microfluidic channel fabrication in dry film resist for production and prototyping of hybrid chips Lab Chip 5 158-62 (Pubitemid 40260857)
46. Kong D, Kang T, Seo C, Cho C and Lee J 2010 Fabrications of a continuous-flow DNA amplifier using dry film resist Biochip J. 4 179-83
47. Kalkandjiev K, Gutzweiler L, Welsche M, Zengerle R and Koltay P 2010 A novel approach for the fabrication of all-polymer microfluidic devices Proc. IEEE-MEMS (Hong Kong, China) pp 1079-82
48. Stöhr U, Vulto P, Hoppe P, Urban G and Reinecke H 2008 High-resolution permanent photoresist laminate for microsystem applications J. Micro/Nanolithogr., MEMS MOEMS 7 033009
49. TOPAS Advanced Polymers 2006 Material Datasheet-TOPAS Cyclic Olefin Copolymer (COC)
50. Riegger L, Strohmeier O, Faltin B, Zengerle R and Koltay P 2010 Adhesive bonding of microfluidic chips: influence of process parameters J. Micromech. Microeng. 20 087003
51. Wangler N, Gutzweiler L, Mueller C, Mayenfels F, Reinecke H, Zengerle R and Paust N 2010 in preparation