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Volumn 12, Issue 2, 2012, Pages 396-400

Parylene to silicon nitride bonding for post-integration of high pressure microfluidics to CMOS devices

(2) Ciftlik, Ata Tuna a Gijs, Martin A M a

a EPFL (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; POLY(METHYL METHACRYLATE); SILICON NITRIDE;

ARTICLE; COST EFFECTIVENESS ANALYSIS; DEVICE; FLOW RATE; HYPERBARISM; LOW TEMPERATURE; METHODOLOGY; MICROFLUIDICS; PRIORITY JOURNAL; TECHNOLOGY;

EID: 84055172801 PISSN: 14730197 EISSN: 14730189 Source Type: Journal
DOI: 10.1039/c1lc20727j Document Type: Article

Times cited : (31)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.