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Volumn 74, Issue 13, 2002, Pages 3084-3095

Complementary metal oxide semiconductor cantilever arrays on a single chip: Mass-sensitive detection of volatile organic compounds

(5) Lange, Dirk a Hagleitner, Christoph a Hierlemann, Andreas a Brand, Oliver a Baltes, Henry a

a ETH ZURICH (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MASS SENSING MECHANISM;

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; COATINGS; MICROMACHINING; SENSORS; TOLUENE;

VOLATILE ORGANIC COMPOUNDS;

METAL OXIDE; OCTANE; POLYMER; TOLUENE; VOLATILE ORGANIC COMPOUND;

ACCURACY; ANALYTIC METHOD; ARTICLE; INTERMETHOD COMPARISON; QUANTITATIVE ANALYSIS; SEMICONDUCTOR; SENSOR; VALIDATION PROCESS;

EID: 0036646553 PISSN: 00032700 EISSN: None Source Type: Journal
DOI: 10.1021/ac011269j Document Type: Article

Times cited : (278)

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