A low-temperature parylene-to-silicon dioxide bonding technique for high-pressure microfluidics

Journal of Micromechanics and Microengineering

Volumn 21, Issue 3, 2011, Pages

  Ciftlik, A T ^a   Gijs, M A M ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING PROCESS; BONDING STRENGTH; BONDING TECHNIQUES; BURST PRESSURES; ELECTROLYTE SOLUTIONS; FLUIDIC INTERCONNECTIONS; INTEGRATED SYSTEMS; INTEGRATION TECHNOLOGIES; LOW TEMPERATURES; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CHIP; MULTIPLE METALS; PARYLENES; PRESSURE APPLICATIONS; SILICON DIOXIDE; WIREBONDING;

ELECTROCHEMICAL CORROSION; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTROLYTES; FLUIDIC DEVICES; INTEGRATED OPTICS; INTEGRATION; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON OXIDES; SILICON WAFERS;

MICROFLUIDICS;

EID: 79952673363     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/3/035011     Document Type: Article

References (43)

1. Huh D, Gu W, Kamotani Y, Grotberg J B and Takayama S 2005 Microfluidics for flow cytometric analysis of cells and particles Physiol. Meas. 26 R73
2. Kirby B J, Reichmuth D S, Renzi R F, Shepodd T J and Wiedenman B J 2005 Microfluidic routing of aqueous and organic flows at high pressures: fabrication and characterization of integrated polymer microvalve elements Lab on a Chip 5 184-90 (Pubitemid 40260861)
3. Reichmuth D S, Shepodd T J and Kirby B J 2005 Microchip HPLC of peptides and proteins Anal. Chem. 77 2997-3000 (Pubitemid 40617352)
4. Reichmuth D S, Shepodd T J and Kirby B J 2004 On-chip high-pressure picoliter injector for pressure-driven flow through porous media Anal. Chem. 76 5063-8 (Pubitemid 39180334)
5. Zareian-Jahromi M A and Agah M 2010 Microfabricated gas chromatography columns with monolayer-protected gold stationary phases Microelectromech. Syst. 19 294-304
6. Zareian-Jahromi M A, Ashraf-Khorassani M, Taylor L T and Agah M 2009 Design, modeling, and fabrication of MEMS-based multicapillary gas chromatographic columns Microelectromech. Syst. 18 28-37
7. Bhushan A, Yemane D, Overton E B, Goettert J and Murphy M C 2007 Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns Microelectromech. Syst. 16 383-93 (Pubitemid 46566291)
8. Noh H-S, Hesketh P J and Frye-Mason G C 2002 Parylene gas chromatographic column for rapid thermal cycling Microelectromech. Syst. 11 718-25
9. Malainou A, Vlachopoulou M E, Triantafyllopoulou R, Tserepi A and Chatzandrouli S 2008 The fabrication of a microcolumn for gas separation using poly(dimethylsiloxane) as the structural and functional material Micromech. Microeng. 18 105007
10. Agah M, Lambertus G R, Sacks R and Wise K 2006 High-speed MEMS-based gas chromatography Microelectromech. Syst. 15 1371-8 (Pubitemid 44566955)
11. Agah M, Potkay J A, Lambertus G, Sacks R and Wise K D 2005 High-performance temperature-programmed microfabricated gas chromatography columns Microelectromech. Syst. 14 1039-50 (Pubitemid 41555295)
12. Tsao C-W and DeVoe D 2009 Bonding of thermoplastic polymer microfluidics Microfluidics Nanofluidics 6 1-16
13. Mair D A, Rolandi M, Snauko M, Noroski R, Svec F and Fréchet J M J 2007 Room-temperature bonding for plastic high-pressure microfluidic chips Anal. Chem. 79 5097-102 (Pubitemid 47051469)
14. Hasselbrink E F, Shepodd T J and Rehm J E 2002 High-pressure microfluidic control in lab-on-a-chip devices using mobile polymer monoliths Anal. Chem. 74 4913-8
15. Lin C-W, Hsu C-P, Yang H-A, Wang W C and Fang W 2008 Implementation of silicon-on-glass MEMS devices with embedded through-wafer silicon vias using the glass reflow process for wafer-level packaging and 3D chip integration Micromech. Microeng. 18 025018
16. Becker H and Gärtner C 2008 Polymer microfabrication technologies for microfluidic systems Anal. Bioanalytical Chem. 390 89-111
17. Metz S, Bertsch A, Bertrand D and Renaud P 2004 Flexible polyimide probes with microelectrodes and embedded microfluidic channels for simultaneous drug delivery and multi-channel monitoring of bioelectric activity Biosens. Bioelectron. 19 1309-18 (Pubitemid 38376394)
18. Kim H and Najafi K 2005 Characterization of low-temperature wafer bonding using thin-film parylene Microelectromech. Syst. 14 1347-55 (Pubitemid 41830208)
19. Ettouhami A, Essaid A, Ouakrim N, Michel L and Limouri M 1996 Thermal buckling of silicon capacitive pressure sensor Sensors Actuators A 57 167-71 (Pubitemid 126366053)
20. Niklaus F, Andersson H, Enoksson P and Stemme G 2001 Low temperature full wafer adhesive bonding of structured wafers Sensors Actuators A 92 235-41 (Pubitemid 32697902)
21. Zhou X, Virasawmy S and Quan C 2009 Wafer-level BCB bonding using a thermal press for microfluidics Microsyst. Technol. 15 573-80
22. Wu Q, Lorenz N and Hand D 2009 Localised laser joining of glass to silicon with BCB intermediate layer Microsyst. Technol. 15 1051-7
23. Metz S, Jiguet S, Bertsch A and Renaud P 2004 Polyimide and SU-8 microfluidic devices manufactured by heat-depolymerizable sacrificial material technique Lab on a Chip 4 114-20 (Pubitemid 38525302)
24. Abgrall P and Gué A M 2007 Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem-a review Micromech. Microeng. 17 R15
25. Poenar D P, Iliescu C, Carp M, Pang A J and Leck K J 2007 Glass-based microfluidic device fabricated by parylene wafer-to-wafer bonding for impedance spectroscopy Sensors Actuators A 139 162-71 (Pubitemid 47321867)
26. Ziegler D, Suzuki T and Takeuchi S 2006 Fabrication of flexible neural probes with built-in microfluidic channels by thermal bonding of parylene Microelectromech. Syst. 15 1477-82 (Pubitemid 44921765)
27. Chang T Y, Yadav V G, De Leo S, Mohedas A, Rajalingam B, Chen C-L, Selvarasah S, Dokmeci M R and Khademhosseini A 2007 Cell and protein compatibility of parylene-C surfaces Langmuir 23 11718-25 (Pubitemid 350133020)
28. Selvarasah S, Chao S H, Chen C L, Sridhar S, Busnaina A, Khademhosseini A and Dokmeci M R 2008 A reusable high aspect ratio parylene-C shadow mask technology for diverse micropatterning applications Sensors Actuators A 145-146 306-15
29. Noh H-S, Moon K-S, Cannon A, Hesketh P J and Wong C P 2004 Wafer bonding using microwave heating of parylene intermediate layers Micromech. Microeng. 14 625
30. Charlot S, Gué A-M, Tasselli J, Marty A, Abgrall P and Estève D 2008 A low cost and hybrid technology for integrating silicon sensors or actuators in polymer microfluidic systems Micromech. Microeng. 18 017003
31. Ko H S, Liu C W, Gau C and Jeng D Z 2008 Flow characteristics in a microchannel system integrated with arrays of micro-pressure sensors using a polymer material Micromech. Microeng. 18 075016
32. Belloy E, Sayah A and Gijs M A M 2002 Micromachining of glass inertial sensors Microelectromech. Syst. 11 85-90 (Pubitemid 34277082)
33. Sayah A, Parashar V K, Pawlowski A G and Gijs M A M 2005 Elastomer mask for powder blasting microfabrication Sensors Actuators A 125 84-90 (Pubitemid 41460454)
34. Gawad S, Schild L and Renaud P 2001 Micromachined impedance spectroscopy flow cytometer for cell analysis and particle sizing Lab on a Chip 1 76-82
35. Tooker A, Meng E, Erickson J, Yu-Chong T and Pine J 2005 Biocomplatible parylene neurocages IEEE Eng. Med. Biol. Mag. 24 30-3
36. Sim W, Kim B, Choi B and Park J O 2005 Theoretical and experimental studies on the parylene diaphragms for microdevices Microsyst. Technol. 11 11-5 (Pubitemid 40003504)
37. Harder T A, Tze-Jung Y, Qing H, Chi-Yuan S and Yu-Chong T 2002 Residual stress in thin-film parylene-C Proc. 15th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2002) (Las Vegas, NV, USA) pp 435-438 (Pubitemid 34216308)
38. Meng E and Yu-Chong T 2005 Parylene etching techniques for microfluidics and bioMEMS Proc. 18th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2005) (Miami, FL, USA) pp 568-71 (Pubitemid 41462420)
39. Callahan R R A, Raupp G B and Beaudoin S P 2001 Effects of gas pressure and substrate temperature on the etching of parylene-N using a remote microwave oxygen plasma J. Vac. Sci. Technol. B 19 725-31 (Pubitemid 32877836)
40. Yussuf A A, Sbarski I, Solomon M, Tran N and Hayes J P 2007 Sealing of polymeric-microfluidic devices by using high frequency electromagnetic field and screen printing technique J. Mater. Process. Technol. 189 401-8 (Pubitemid 46546624)
41. Eddings M A, Michael J A and Bruce G K 2008 Determining the optimal PDMS-PDMS bonding technique for microfluidic devices Micromech. Microeng. 18 067001
42. Paul D, Pallandre A, Miserere S, Weber J and Viovy J L 2007 Lamination-based rapid prototyping of microfluidic devices using flexible thermoplastic substrates Electrophoresis 28 1115-22 (Pubitemid 46592908)
43. Berdat B, Rodríguez A C M, Herrera F and Gijs M A M 2008 Label-free detection of DNA with interdigitated micro-electrodes in a fluidic cell Lab Chip 8 302-8 (Pubitemid 351191405)