Monolithically integrated micro flow sensor for lab-on-chip applications

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 164-170

  Scholer L ^a   Lange, B ^a   Seibel, K ^a   Schafer H ^a   Walder, M ^a   Friedrich, N ^a   Ehrhardt, D ^a   Schonfeld F ^b   Zech, G ^a   Bohm M ^a  

^a UNIVERSITY OF SIEGEN   (Germany)

^b INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

Lab on chip; Mass flow sensor; Microfluidics

Indexed keywords

ACTUATORS; DATA REDUCTION; FLUIDICS; HEAT LOSSES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; MONOLITHIC INTEGRATED CIRCUITS; SUBSTRATES; THERMAL EFFECTS;

LAB-ON-CHIP; MASS FLOW SENSORS; MICROFLUIDICS; MICROTECHNOLOGY;

SENSORS;

EID: 20144364628     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.022     Document Type: Conference Paper

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