A full-wafer fabrication process for glass microfluidic chips with integrated electroplated electrodes by direct bonding of dry film resist

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Vulto, Paul ^a   Huesgen, Till ^a   Albrecht, Björn ^a   Urban, G A ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPLYING PRESSURE; DIRECT BONDING; DRY FILM RESIST; MICROFLUIDIC CHANNEL; MICROFLUIDIC CHIP; WAFER FABRICATIONS;

BIOCHIPS; CHLORINE; ELECTRODES; ELECTROPLATING; FABRICATION; FLUIDIC DEVICES; GLASS; GLASS BONDING; MICROFLUIDICS; ORGANIC POLYMERS; SILVER;

WAFER BONDING;

EID: 68249138761     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/077001     Document Type: Article

References (20)

1. Dawoud A A, Kawaguchi T and Jankowiak R 2007 Integrated microfluidic device with an electroplated palladium decoupler for more sensitive amperometric detection of the 8-hydroxy-deoxyguanosine (8-OH-dG) DNA adduct Anal. Bioanal. Chem. 388 245-52
2. Wang Y, Chen H, He Q and Soper S A 2008 A high-performance polycarbonate electrophoresis microchip with integrated three-electrode system for end-channel amperometric detection Electrophoresis 29 1881-8
3. Urbanski J P, Levitan J A, Burch D N, Thorsen T and Bazant M Z 2007 The effect of step height on the performance of three-dimensional ac electro-osmotic microfluidic pumps J. Colloid Interface Sci. 309 332-41
4. Liu Y-J, Guo S-S, Zhang Z-L, Huang W-H, Baigl D, Xie M, Chen Y and Pang D-W 2007 A micropillar-integrated smart microfluidic device for specific capture and sorting of cells Electrophoresis 28 4713-22
5. Dunphy Guzman K A, Karnik R N, Newman J S and Majumdar A 2006 Spatially controlled microfluidics using low-voltage electrokinetics J. MEMS 15 237-45
6. Polk B J, Stelzenmuller A, Mijares G, MacCrehan W and Gaitan M 2006 Ag/AgCl microelectrodes with improved stability for microfluidics Sensors Actuators A 114 239-47
7. Mukhopopadhyay R 2007 When PDMS isn't the best Anal. Chem. 79 3249-53
8. Moser I, Enderle B, Kohn C, Jobst G and Urban G 2005 Foil-based BioMEMS for electrochemical capillary immunoassay for hepatitis serology Proc. of Transducers '05 vol 2 pp 1649-52
9. Vulto P et al 2004 Dry film resist for fast fluidic prototyping Proc. MicroTAS 2004 pp 43-5
10. Vulto P, Glade N, Altomare L, Bablet J, Tin L D, Medoro G, Chartier I, Manaresi N, Tartagni M and Guerrieri R 2005 Microfluidic channel fabrication in dry film resist for production and prototyping of hybrid chips Lab Chip 5 158-62
11. Bilenberg B, Nielsen T, Clausen B and Kristensen A 2004 PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with integrated optics J. Micromech. Microeng. 14 814-8
12. Blanco F J, Agirregabiria M, Garcia J, Berganzo J, Tijero M, Arroyo M T, Ruano J M, Aramburu I and Mayora K 2004 Novel three-dimensional embedded SU-8 microchannels fabricated using a low temperature full wafer adhesive bonding J. Micromech. Microeng. 14 1047-56
13. Vulto P, Medoro G, Altomare L, Urban G A, Tartagni M, Guerrieri R and Manaresi N 2006 Selective sample recovery of DEP-separated cells and particles by phaseguide-controlled laminar flow J. Micromech. Microeng. 16 1847-53
14. Huesgen T, Bartsch U, Albrecht B, Vulto P and Woias P 2008 Wafer-level dry-film photoresist adhesive bonding for 3D-MEMS integration and packaging Proc. MME 2008 pp 255-8
15. Ito T, Kawaguchi T, Miyoshi H, Maruyama K, Kaneko S, Ohya S, Iwasaki Y, Niwa O and Suzuki K 2007 Characterization of a microfluidic device fabricated using a photosensitive sheet J. Micromech. Microeng. 17 432-8
16. Joseph P, Cottin-Bizonne C, Benot J-M, Ybert C, Journet C, Tabeling P and Bocquet L 2006 Slippage of water past superhydrophobic carbon nanotube forests in microchannels Phys. Rev. Lett. 97 156104 1-4
17. Stöhr U, Vulto P, Hoppe P, Urban G and Reinecke H 2008 High-resolution permanent photoresist laminate for microsystem applications J. Micro/Nanolith. MEMS MOEMS (JM3) 7 033009
18. ORDYL SY 300, safety data sheet, 1-4
19. BMR Developer C-3, safety data sheet, 1-6
20. Vulto P, Kuhn P and Urban G A 2008 Silver/silver chloride electrodes for bubble-free actuation in a micro-electrophoresis cell Proc. Biosensors 2008 P3.139