Fluorine-based plasma treatment of biocompatible silicone elastomer: The effect of temperature on etch rate and surface properties

Plasma Processes and Polymers

Volumn 5, Issue 3, 2008, Pages 246-255

  Szmigiel, Dariusz ^a   Hilbert, Cyrille ^b   Bertsch, Arnaud ^c   Pamula, Elzbieta ^d   Domański, Krzysztof ^a   Grabiec, Piotr ^a   Prokaryn, Piotr ^a   Ścisłowska Czarnecka, Anna ^e   Plytycz, Barbara ^f  

^a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

^b Centre of MicroNanoTechnology CMI   (Switzerland)

^c EPFL   (Switzerland)

^d AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

^e UNIVERSITY OF PHYSICAL EDUCATION   (Poland)

^f JAGIELLONIAN UNIVERSITY   (Poland)

Author keywords

Coatings for medical implants; Cytotoxicity; Plasma etching; Polysiloxane; Silicone rubber; Surface modification

Indexed keywords

DRY ETCHING; ELASTOMERS; ETCHING; FLUORINE; PHOTORESISTS; PLASMA APPLICATIONS; PLASMA DIAGNOSTICS; PLASMA ETCHING; PLASMAS; PLASTICS; POLYMERS; RUBBER; RUBBER COATINGS; SILICONE COATINGS; SILICONES; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; SURFACE TREATMENT; TRACE ANALYSIS;

BIOCOMPATIBLE; BIOMEDICAL APPLICATIONS; CELL VIABILITIES; EFFECT OF TEMPERATURES; ELASTOMER SURFACES; ETCH RATES; ETCHING PROCESSES; HYDROPHOBIC; MICROPROCESSING; PLASMA EXPOSURES; PLASMA TREATMENTS; POLYSILOXANE; SILICONE ELASTOMERS; SILICONE RUBBER; SURFACE MODIFICATION; TEMPERATURE DEPENDENTS;

SURFACE PROPERTIES;

EID: 54149091432     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200700130     Document Type: Article

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