Novel interconnection technologies for integrated microfluidic systems

Sensors and Actuators, A: Physical

Volumn 77, Issue 1, 1999, Pages 57-65

  Gray, B L ^a   Jaeggi, D ^a,b   Mourlas, N J ^b   Van Drieenhuizen B P ^a   Williams, K R ^a   Maluf, N I ^a,b   Kovacs, G T A ^b  

^a Lucas NovaSensor   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; FLUIDIC DEVICES; PRESSURE TRANSDUCERS; REACTIVE ION ETCHING; SENSORS; SILICON;

SILICON FUSION BONDING;

MICROELECTROMECHANICAL DEVICES;

EID: 0033363098     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00185-5     Document Type: Article

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