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Volumn 88, Issue 8, 2011, Pages 1878-1883

Fabrication of AD/DA microfluidic converter using deep reactive ion etching of silicon and low temperature wafer bonding

Author keywords

Adhesive bonding; Deep reactive ion etching; Electrowetting on dielectric; Microfluidic converter

Indexed keywords

DEBONDING; DROPS; FABRICATION; IONS; MICROFLUIDICS; SILICON WAFERS; TEMPERATURE; WAFER BONDING;

EID: 79960067339     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.12.001     Document Type: Conference Paper
Times cited : (16)

References (17)
  • 1
    • 33747117373 scopus 로고    scopus 로고
    • G.M. Whitesides Nature 442 27 2006 368 373
    • (2006) Nature , vol.442 , Issue.27 , pp. 368-373
    • Whitesides, G.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.