Multilayered microfluidic probe heads

Journal of Micromechanics and Microengineering

Volumn 19, Issue 11, 2009, Pages

  Lovchik, Robert D ^a   Drechsler, Ute ^a   Delamarche, Emmanuel ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL TOOL; CLOSED SYSTEMS; HIGH RESOLUTION; HIGH YIELD; HYDRODYNAMIC FLOWS; MICROFABRICATED; MICROFLUIDIC PROBES; MULTI-LAYERED; PATTERNING PROTEINS; POLYDIMETHYLSILOXANE PDMS; SI WAFER; TAPERED STRUCTURE;

FLUID DYNAMICS; LIQUIDS; POLYIMIDES; PROBES; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS; SILICONES;

MICROFLUIDICS;

EID: 70350686650     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/11/115006     Document Type: Article

References (23)

1. Brody J P, Yager P, Goldstein R E and Austin R H 1996 Biotechnology at low reynolds numbers Biophys. J. 71 3430-41
2. Knight J B, Vishwanath A, Brody J P and Austin R H 1998 Hydrodynamic focusing on a silicon chip: mixing nanoliter in microseconds Phys. Rev. Lett. 80 3863-6
3. Squires T M and Quake S R 2005 Microfluidics: fluid physics at the nanoliter scale Rev. Mod. Phys. 77 977-1026
4. Kenis P J A, Ismagilov R F and Whitesides G M 1999 Microfabrication inside capillaries using multiphase laminar flow patterning Science 285 83-5
5. Derby B 2008 Bioprinting: inkjet printing proteins and hybrid cell-containing materials and structures J. Mater. Chem. 18 5717-21
6. Kim K H, Moldovan N and Espinosa H D 2005 A nanofountain probe with sub-100 nm molecular writing resolution Small 6 632-5
7. Meister A, Liley M, Brugger J, Pugin R and Heinzelmann H 2004 Nanodispenser for attoliter volume deposition using atomic force microscopy probes modified by focused-ion-beam milling Appl. Phys. Lett. 85 6260-2
8. Ahmadzadeh H, Thompson L V and Arriaga E A 2005 On-column labeling for capillary electrophoretic analysis of individual mitochondria directly sampled from tissue cross sections Anal. Bioanal. Chem. 384 169-74
9. Rodolfa K T, Bruckbauer A, Zhou D, Schevchuk A, Korchev Y E and Klenerman D 2006 Nanoscale pipetting for controlled chemistry in small arrayed water droplets using a double-barrel pipet Nano Lett. 6 252-7
10. Ying L, Bruckbauer A, Rothery A M, Korchev Y E and Klenerman D 2002 Programmable delivery of DNA through a nanopipet Anal. Chem. 74 1380-5
11. Meister A, Polesel-Maris J, Przybylska J, Studer P, Zambelli T, Liley M, Vörös J and Heinzelmann H 2009 Nanoscale dispensing in liquid environment of streptavidin on a biotin-functionalized surface using hollow atomic force microscopy probes Microelectron. Eng. 86 1481-4
12. Bruckbauer A, Zhou D, Ying L, Korchev Y E, Abell C and Klenerman D 2003 Multicomponent submicron features of biomolecules created by voltage controlled deposition from a nanopipet J. Am. Chem. Soc. 125 9834-9
13. Bruckbauer A, Ying L, Rothery A M, Zhou D, Shevchuk A I, Abell C, Korchev Y E and Klenerman D 2002 Writing with DNA and protein using a nanopipet for controlled delivery J. Am. Chem. Soc. 124 8810-1
14. Juncker D, Schmid H and Delamarche E 2005 Multipurpose microfluidic probe Nat. Mater. 4 622-8
15. Shiku H et al 2009 A microfluidic dual capillary probe to collect messenger RNA from adherent cells and spheroids Anal. Biochem. 385 138-42
16. Queval A, Perrault C M, Qasaimeh M A, McKinney R A and Juncker D 2008 Design and fabrication of a PDMS microfluidic probe and perfusion chamber for microfluidic experiments with organotypic brain slices Proc. μTAS 2008 Conf. pp 1663-5
17. Murphy E R, Inou T, Sahoo H R, Zaborenko N and Jensen K F 2007 Solder-based chip-to-tube and chip-to-chip packaging for microfluidic devices Lab Chip 7 1309-14
18. Lee J N, Park C and Whitesides G M 2003 Solvent compatibility of poly(dimethylsiloxane)-based microfluidic devices Anal. Chem. 75 6544-54
19. Kundu P K and Cohen I M 2002 Fluid Mechanics 2nd edn (San Diego, CA: Academic) pp 274-7
20. Duffy D C, McDonald J C, Schueller O J A and Whitesides G M 1998 Rapid prototyping of microfluidic systems in poly(dimethylsiloxane) Anal. Chem. 70 4974-84
21. Roxhead N, Griss P and Stemme G 2007 A method for tapered deep reactive ion etching using a modified Bosch process J. Micromech. Microeng. 17 1087-92
22. Holly R and Hingerl K 2006 Fabrication of silicon vertical taper structures using KOH anisotropic etching Microelecton. Eng. 83 1430-3
23. Sure A, Dillon T, Murakowski J, Lin C, Pustai D and Prather D W 2003 Fabrication and characterization of three-dimensional silicon tapers Opt. Exp. 11 3555-61