Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications

Journal of Micromechanics and Microengineering

Volumn 19, Issue 10, 2009, Pages

  Lopez Martinez, M J ^a,d   Campo, E M ^a,b   Caballero, D ^b   Fernandez, E ^c   Errachid, A ^b,e   Esteve, J ^a   Plaza, J A ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

^c UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^d UNIVERSITY OF GRONINGEN   (Netherlands)

^e UNIVERSITÉ LYON 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AFM CANTILEVERS; ANODIC BONDING; BIOLOGICAL APPLICATIONS; CAPILLARY FILLING; DEEP REACTIVE ION ETCHING; DESIGN CONSIDERATIONS; ETCHING PROCESS; FLOW TESTS; GLASS SUBSTRATES; INLET PORTS; MANUFACTURING PROCESS; MECHANICAL TESTS; MICRO-PIPETTE; MICROPIPETTES; MOUSE CELLS; OPTICAL MICROSCOPES; ROBUST TECHNOLOGY; TECHNOLOGY-BASED;

ATOMIC FORCE MICROSCOPY; ELECTRON BEAM LITHOGRAPHY; GLASS BONDING; ION BEAMS; PIERCING;

REACTIVE ION ETCHING;

EID: 70350637579     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/10/105013     Document Type: Article

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