Microthermoforming of nanostructured polymer films: A new bonding method for the integration of nanostructures in 3-dimensional cavities

Microsystem Technologies

Volumn 16, Issue 7, 2010, Pages 1221-1231

  Heilig, Markus ^a   Giselbrecht, Stefan ^a   Guber, Andreas ^a   Worgull, Matthias ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

3-DIMENSIONAL; A-THERMAL; ANALYTICAL MODEL; BIAXIAL STRETCHING; BONDING METHODS; GEOMETRICAL MODIFICATION; NANO-IMPRINTING; NANOSTRUCTURED POLYMERS; NANOSTRUCTURED SURFACE; POLYMER CAVITY; STRUCTURED FILMS; THERMAL BONDING;

MATHEMATICAL MODELS; NANOSTRUCTURES; PLASTIC FILMS; POLYMERS; THERMOFORMING;

POLYMER FILMS;

EID: 77955854202     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1072-2     Document Type: Conference Paper

References (12)

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