Clustersurface interaction: From soft landing to implantation

Surface Science Reports

Volumn 66, Issue 10, 2011, Pages 347-377

  Popok, Vladimir N ^a,b   Barke, Ingo ^a   Campbell, Eleanor E B ^c,d   Meiwes Broer, Karl Heinz ^a  

^a UNIVERSITY OF ROSTOCK   (Germany)

^b AALBORG UNIVERSITY   (Denmark)

^c UNIVERSITY OF EDINBURGH   (United Kingdom)

^d Konkuk University   (South Korea)

Author keywords

Atomic and molecular clusters; Cluster deposition; Cluster implantation; Cluster induced sputtering; Clustersurface interaction

Indexed keywords

ATOMIC AND MOLECULAR CLUSTERS; CLUSTER DEPOSITION; CLUSTER IMPLANTATION; CLUSTER-INDUCED SPUTTERING; CLUSTER-SURFACE INTERACTIONS;

ATOMS; ELECTRON ENERGY LOSS SPECTROSCOPY; HIGH ENERGY PHYSICS; KINETIC ENERGY; KINETICS; LANDING; MEDICAL NANOTECHNOLOGY; NANOMAGNETICS; PLASMA ETCHING; RADIATION DAMAGE; SEMICONDUCTOR DOPING;

METEOR IMPACTS;

EID: 79961001954     PISSN: 01675729     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfrep.2011.05.002     Document Type: Review

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