Focused nanoparticle-beam deposition of patterned microstructures

Applied Physics Letters

Volumn 77, Issue 6, 2000, Pages 910-912

  Di Fonzo, F ^a   Gidwani, A ^a   Fan, M H ^a   Neumann, D ^a   Iordanoglou, D I ^a   Heberlein, J V R ^a   McMurry, P H ^a   Girshick, S L ^a   Tymiak, N ^a   Gerberich, W W ^a   Rao, N P ^b  

^a University of Minnesota   (United States)

^b MicroTherm   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000548944     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1306638     Document Type: Article

References (13)

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