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Volumn 76, Issue 4, 2005, Pages

Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC VAPOR GROWTH; CLUSTER BEAM SOURCES; GAS CONDENSATION; MAGNETRON PLASMA SPUTTERING;

EID: 17644394570     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1869332     Document Type: Article
Times cited : (242)

References (34)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.