Etching characteristics for tracks of carbon cluster ions in polycarbonate

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 217, Issue 4, 2004, Pages 621-626

  Zhao, Ziqiang ^a   Qi, Dongchen ^a   Guo, Zhiyu ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Carbon cluster; Distribution; Energy loss; Etching rate; Latent tracks; Polycarbonate; Pores

Indexed keywords

APPROXIMATION THEORY; CASCADE CONNECTIONS; CROSSLINKING; ENERGY DISSIPATION; FUZZY CONTROL; ION BEAMS; IRRADIATION; MATRIX ALGEBRA; MICROMACHINING; NANOSTRUCTURED MATERIALS; POLYETHYLENE TEREPHTHALATES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY;

CARBON CLUSTER; DISTRIBUTION; ENERGY LOSS; ETCHING RATE; LATENT TRACKS; PORES;

POLYCARBONATES;

EID: 2342455840     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.11.091     Document Type: Article

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