Charged nanoparticles in thin film and nanostructure growth by chemical vapour deposition

Journal of Physics D: Applied Physics

Volumn 43, Issue 48, 2010, Pages

  Hwang, Nong Moon ^a   Lee, Dong Kwon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BUILDING BLOCKES; CHARGED GAS; CHARGED NANOPARTICLES; CHEMICAL VAPOUR DEPOSITION; CONVENTIONAL PROCESSING; DETECTION TECHNIQUE; DIAMOND CVD; DIAMOND GROWTH; GASPHASE; GROWTH MECHANISMS; GROWTH OF THIN FILMS; NANOSTRUCTURE GROWTH; NEW MECHANISMS; PHYSICAL VAPOUR DEPOSITION; PLASMA-AIDED NANOFABRICATION; PLASMA-CVD; PUZZLING PHENOMENA; SILICON FILMS; SIMULTANEOUS DEPOSITION; THERMODYNAMIC AND KINETIC ANALYSIS;

CRYSTAL GROWTH; DEPOSITION; DIAMOND FILMS; DIAMONDS; ETCHING; FILM GROWTH; NANOCLUSTERS; NANOPARTICLES; THIN FILMS;

CHEMICAL VAPOR DEPOSITION;

EID: 78650144181     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/48/483001     Document Type: Review

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