Non-uniform deposition in the early stage of hot-wire chemical vapor deposition of silicon: The charge effect approach

Thin Solid Films

Volumn 515, Issue 19 SPEC. ISS., 2007, Pages 7446-7450

  Song, Jean Ho ^b   Jo, Wook ^a   Hwang, Nong Moon ^a  

^a National Research Laboratory of Charged Nanoparticles   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Charged nanoparticles; Chemical vapor deposition; Hot wire; Negative charge; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GAS MIXTURES; GLASS; NANOPARTICLES; STAINLESS STEEL;

CHARGE REMOVAL; GLASS SUBSTRATES; HOT-WIRE CHEMICAL VAPOR DEPOSITION;

SILICON;

EID: 34547598105     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.170     Document Type: Article

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