Dust formation and charging in an Ar/SiH4 radio-frequency discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 2, 1996, Pages 556-561

  Stoffels, E ^a   Stoffels, W W ^a   Kroesen, G M W ^a   De Hoog, F J ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030527959     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580144     Document Type: Article

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