An experimental and numerical study of particle nucleation and growth during low-pressure thermal decomposition of silane

Journal of Aerosol Science

Volumn 34, Issue 6, 2003, Pages 691-711

  Nijhawan, Sandeep ^a,c   McMurry, Peter H ^a   Swihart, Mark T ^a,d   Suh, Song Moon ^a   Girshick, Steven L ^a   Campbell, Stephen A ^a   Brockmann, John E ^b  

^a University of Minnesota   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c APPLIED MATERIALS INC   (United States)

^d State University of New York   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NUCLEATION; PARTICLE SIZE ANALYSIS; PRESSURE EFFECTS; PYROLYSIS; REACTION KINETICS; THERMAL EFFECTS;

PARTICLE NUCLEATION;

SILANES;

SILANE; SILICON DERIVATIVE; SILICON HYDRIDE; UNCLASSIFIED DRUG;

AEROSOL; SILANE;

AEROSOL; ALGORITHM; ARTICLE; DECOMPOSITION; DIFFUSION; DYNAMICS; FLUID FLOW; GROWTH RATE; HYPOBARISM; KINETICS; MASS SPECTROMETRY; MEASUREMENT; MODEL; PARTICLE SIZE; PRIORITY JOURNAL; REACTOR; SEMICONDUCTOR; TEMPERATURE SENSITIVITY; THERMAL ANALYSIS; VAPOR;

EID: 0038703418     PISSN: 00218502     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0021-8502(03)00029-6     Document Type: Article

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