Cluster size measurement using microtrench in a thermal plasma flash evaporation process

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 3, 1997, Pages 558-565

  Takamura, Yuzuru ^a,b   Hayasaki, Kei ^a   Terashima, Kazuo ^a   Yoshida, Toyonobu ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042572575     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589292     Document Type: Article

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