SCOPUS 정보 검색 플랫폼

Volumn 49, Issue 3-4, 2004, Pages 171-190

Charged clusters in thin film growth

a Seoul National University (South Korea)

Author keywords

Chemical vapour deposition (CVD); Diamond CVD; Growth mechanism; Physical vapour deposition; Silicon CVD; Theory of charged clusters; Thin films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; FILM GROWTH; GRAIN BOUNDARIES; IONIZATION; PHYSICAL VAPOR DEPOSITION; RECRYSTALLIZATION (METALLURGY); SILICON;

CHARGED CLUSTERS; GRAPHITE ETCHING; GROWTH MECHANISMS; THIN FILM REACTORS;

THIN FILMS;

EID: 4444240162 PISSN: 09506608 EISSN: None Source Type: Journal
DOI: 10.1179/095066004225021891 Document Type: Review

Times cited : (71)

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