Generation of charged nanoparticles and their deposition during the synthesis of silicon thin films by chemical vapor deposition

Journal of Applied Physics

Volumn 108, Issue 1, 2010, Pages

  Kim, Chan Soo ^a   Youn, Woong Kyu ^a   Hwang, Nong Moon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS EFFECTS; CHARGED NANOPARTICLES; CRYSTALLINITIES; CVD REACTORS; DEPOSITED FILMS; DIFFERENTIAL MOBILITY ANALYZERS; ELECTRIC BIAS; FARADAY CUP ELECTROMETERS; GASPHASE; SILICON FILMS; SILICON THIN FILM; SUBSTRATE HOLDERS;

DEPOSITION; FILM GROWTH; GASES; METALLIC FILMS; NANOPARTICLES; SEMICONDUCTING SILICON COMPOUNDS; SYNTHESIS (CHEMICAL);

CHEMICAL VAPOR DEPOSITION;

EID: 77955187767     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3452352     Document Type: Article

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