Effect of methane concentration on size of charged clusters in the hot filament diamond CVD process

Journal of Crystal Growth

Volumn 223, Issue 1-2, 2001, Pages 6-14

  Jeon, In D ^a   Park, Chang J ^b   Kim, Doh Y ^a   Hwang, Nong M ^a,b  

^a Seoul National University   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CONCENTRATION (PROCESS); CRYSTAL GROWTH; DIELECTRIC MATERIALS; HYDROGEN; METHANE; POLYCRYSTALLINE MATERIALS;

HOT FILAMENT DIAMOND;

DIAMONDS;

EID: 0034818736     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)01016-2     Document Type: Article

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