-
2
-
-
0001662022
-
-
0963-0252
-
For examples, see papers in Plasma Sources Sci. Technol. 0963-0252 3, 329 (1994); IEEE Trans. Plasma Sci. 0093-3813 PS22, 89 (1994); J. Vac. Sci. Technol. A 14, 487 (1996).
-
(1994)
Plasma Sources Sci. Technol.
, vol.3
, pp. 329
-
-
-
3
-
-
0343478744
-
-
0093-3813
-
For examples, see papers in Plasma Sources Sci. Technol. 0963-0252 3, 329 (1994); IEEE Trans. Plasma Sci. 0093-3813 PS22, 89 (1994); J. Vac. Sci. Technol. A 14, 487 (1996).
-
(1994)
IEEE Trans. Plasma Sci.
, vol.22
, pp. 89
-
-
-
4
-
-
0039807778
-
-
For examples, see papers in Plasma Sources Sci. Technol. 0963-0252 3, 329 (1994); IEEE Trans. Plasma Sci. 0093-3813 PS22, 89 (1994); J. Vac. Sci. Technol. A 14, 487 (1996).
-
(1996)
J. Vac. Sci. Technol. A
, vol.14
, pp. 487
-
-
-
5
-
-
31844432173
-
-
S. Nunomura, K. Koga, M. Shiratani, Y. Watanabe, Y. Morisada, N. Matsuki, and S. Ikeda, Jpn. J. Appl. Phys., Part 2 44, L1509 (2005).
-
(2005)
Jpn. J. Appl. Phys., Part 2
, vol.44
, pp. 1509
-
-
Nunomura, S.1
Koga, K.2
Shiratani, M.3
Watanabe, Y.4
Morisada, Y.5
Matsuki, N.6
Ikeda, S.7
-
9
-
-
0344319524
-
-
A. Bouchoule, A. Plain, L. Boufendi, J. Ph. Blondeau, and C. Laure, J. Appl. Phys. 70, 1991 (1991).
-
(1991)
J. Appl. Phys.
, vol.70
, pp. 1991
-
-
Bouchoule, A.1
Plain, A.2
Boufendi, L.3
Blondeau, J.Ph.4
Laure, C.5
-
11
-
-
36149034135
-
-
A. Garscadden, B. N. Ganguly, P. D. Haaland, and J. Williams, Plasma Sources Sci. Technol. 3, 239 (1994).
-
(1994)
Plasma Sources Sci. Technol.
, vol.3
, pp. 239
-
-
Garscadden, A.1
Ganguly, B.N.2
Haaland, P.D.3
Williams, J.4
-
12
-
-
3943071521
-
-
R. N. Carlile, J. F. O'Hanlon, L. M. Hong, M. P. Garrity, and S. M. Collins, Plasma Sources Sci. Technol. 3, 334 (1994).
-
(1994)
Plasma Sources Sci. Technol.
, vol.3
, pp. 334
-
-
Carlile, R.N.1
O'Hanlon, J.F.2
Hong, L.M.3
Garrity, M.P.4
Collins, S.M.5
-
15
-
-
0030528577
-
-
M. Shiratani, H. Kawasaki, T. Fukuzawa, and Y. Watanabe, J. Vac. Sci. Technol. A 14, 603 (1996).
-
(1996)
J. Vac. Sci. Technol. A
, vol.14
, pp. 603
-
-
Shiratani, M.1
Kawasaki, H.2
Fukuzawa, T.3
Watanabe, Y.4
-
16
-
-
0029770344
-
-
M. Shiratani, H. Kawasaki, T. Fukuzawa, T. Yoshioka, Y. Ueda, S. Singh, and Y. Watanabe, J. Appl. Phys. 79, 104 (1996).
-
(1996)
J. Appl. Phys.
, vol.79
, pp. 104
-
-
Shiratani, M.1
Kawasaki, H.2
Fukuzawa, T.3
Yoshioka, T.4
Ueda, Y.5
Singh, S.6
Watanabe, Y.7
-
19
-
-
33646744107
-
-
Proceedings of the Fourth International Conference on Reactive Plasma
-
S. Maeda, K. Sakamoto, T. Fukuzawa, S. Shiratani, and Y. Watanabe, Proceedings of the Fourth International Conference on Reactive Plasma, 1998, p. 69.
-
(1998)
, pp. 69
-
-
Maeda, S.1
Sakamoto, K.2
Fukuzawa, T.3
Shiratani, S.4
Watanabe, Y.5
-
20
-
-
0030525442
-
-
Y. Watanabe, M. Shiratani, H. Kawasaki, S. Singh, T. Fukuzawa, Y. Ueda, and H. Ohkura, J. Vac. Sci. Technol. A 14, 540 (1996).
-
(1996)
J. Vac. Sci. Technol. A
, vol.14
, pp. 540
-
-
Watanabe, Y.1
Shiratani, M.2
Kawasaki, H.3
Singh, S.4
Fukuzawa, T.5
Ueda, Y.6
Ohkura, H.7
-
21
-
-
0033157449
-
-
M. Shiratani, T. Fukuzawa, and Y. Watanabe, Jpn. J. Appl. Phys., Part 1 38, 4542 (1999).
-
(1999)
Jpn. J. Appl. Phys., Part 1
, vol.38
, pp. 4542
-
-
Shiratani, M.1
Fukuzawa, T.2
Watanabe, Y.3
-
25
-
-
0031072467
-
-
S. Nunomura, N. Ohno, and S. Takamura, Jpn. J. Appl. Phys., Part 1 36, 877 (1997).
-
(1997)
Jpn. J. Appl. Phys., Part 1
, vol.36
, pp. 877
-
-
Nunomura, S.1
Ohno, N.2
Takamura, S.3
-
28
-
-
0003998388
-
-
edited by Robert C.Weast, M. J.Astle, and W. H.Beyer (CRC, Cleveland, OH
-
CRC Handbook of Chemistry and Physics, edited by, Robert C. Weast, M. J. Astle, and, W. H. Beyer, (CRC, Cleveland, OH, 1965).
-
(1965)
CRC Handbook of Chemistry and Physics
-
-
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