Generation of charged nanoparticles during the synthesis of silicon nanowires by chemical vapor deposition

Journal of Physical Chemistry C

Volumn 114, Issue 8, 2010, Pages 3390-3395

  Kim, Chan Soo ^a   Kwak, Il Jo ^a   Choi, Kyoung Jin ^b   Park, Jae Gwan ^b   Hwang, Nong Moon ^a  

^a Seoul National University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED NANOPARTICLES; CVD REACTORS; DIFFERENTIAL MOBILITY ANALYZERS; FARADAY CUP ELECTROMETERS; GASPHASE; GROWTH BEHAVIOR; HYDROGEN FLOW RATE; MOLAR RATIO; PROCESS PARAMETERS; REACTOR TEMPERATURES; SI NANOWIRE; SILICON NANOPARTICLES; SILICON NANOWIRES;

DEPOSITION; GASES; NANOPARTICLES; NANOWIRES; SILICON; SYNTHESIS (CHEMICAL);

CHEMICAL VAPOR DEPOSITION;

EID: 77749249486     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp910242a     Document Type: Article

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