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Volumn 2, Issue 4, 2010, Pages 594-600
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Si quantum dots embedded in an amorphous SiC matrix: Nanophase control by non-equilibrium plasma hydrogenation
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON CONTENT;
COMPOSITIONAL PROPERTIES;
CRYSTALLINITY DEGREE;
DEPOSITED FILMS;
EFFECT OF HYDROGEN;
FLOWRATE RATIO;
FOURIER TRANSFORM INFRARED ABSORPTION SPECTROSCOPY;
HIGH DENSITY PLASMAS;
HYDROGEN DILUTION RATIO;
INDUCTIVELY-COUPLED;
MATRIX;
NANO-PHASE;
NANOPHASE SEGREGATION;
NONEQUILIBRIUM PLASMAS;
NUCLEATION AND GROWTH;
OTHER APPLICATIONS;
PHOTOVOLTAIC SOLAR CELLS;
PRECURSOR GAS;
REACTIVE SILANES;
SI QUANTUM DOT;
SIC FILMS;
SINGLE CRYSTAL SILICON;
SUBSTRATE TEMPERATURE;
ABSORPTION SPECTROSCOPY;
AMORPHOUS FILMS;
AMORPHOUS SILICON;
CRYSTALLITE SIZE;
ELECTROMAGNETIC INDUCTION;
GAS ABSORPTION;
HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;
HYDROGEN;
HYDROGENATION;
INDUCTIVELY COUPLED PLASMA;
INFRARED SPECTROSCOPY;
LIGHT;
LIGHT EMITTING DIODES;
METHANE;
PLASMA DEPOSITION;
PLASMA DIAGNOSTICS;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SEGREGATION (METALLOGRAPHY);
SEMICONDUCTOR QUANTUM DOTS;
SILICON CARBIDE;
SOLAR POWER GENERATION;
SUBSTRATES;
THIN FILM TRANSISTORS;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
METHANE;
QUANTUM DOT;
SILANE DERIVATIVE;
SILICON;
ARTICLE;
CHEMISTRY;
CRYSTALLIZATION;
HEAT;
HYDROGENATION;
INFRARED SPECTROSCOPY;
RAMAN SPECTROMETRY;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
CRYSTALLIZATION;
HOT TEMPERATURE;
HYDROGENATION;
METHANE;
PHOTOELECTRON SPECTROSCOPY;
QUANTUM DOTS;
SILANES;
SILICON;
SPECTROSCOPY, FOURIER TRANSFORM INFRARED;
SPECTRUM ANALYSIS, RAMAN;
X-RAY DIFFRACTION;
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EID: 77953655672
PISSN: 20403364
EISSN: 20403372
Source Type: Journal
DOI: 10.1039/b9nr00371a Document Type: Article |
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Times cited : (103)
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References (39)
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