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Thin Solid Films

Volumn 395, Issue 1-2, 2001, Pages 17-24

Status of Cat-CVD (Hot-Wire CVD) research in Europe

(1) Schropp, R E I a

a UTRECHT UNIVERSITY (Netherlands)

Author keywords

Hot wire CVD; Polycrystalline silicon thin films; Solar cells; Thin film transistors

Indexed keywords

AMORPHOUS SILICON; DIELECTRIC MATERIALS; DOPING (ADDITIVES); OPTOELECTRONIC DEVICES; POLYSILICON; RESEARCH AND DEVELOPMENT MANAGEMENT; RESEARCH LABORATORIES; SOLAR CELLS; THIN FILM TRANSISTORS;

CATALYTIC CHEMICAL VAPOR DEPOSITION (CAT-CVD); HOT-WIRE CHEMICAL VAPOR DEPOSITION (HWCVD);

CHEMICAL VAPOR DEPOSITION;

EID: 0035800999 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01200-7 Document Type: Conference Paper

Times cited : (40)

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