Electron heating and the electrical asymmetry effect in dual-frequency capacitive CF4 discharges

Plasma Sources Science and Technology

Volumn 20, Issue 4, 2011, Pages

  Schulze, J ^a,b   Derzsi, A ^a   Donko Z ^a  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; ANALYTICAL MODELING; ARGON DISCHARGES; DUAL FREQUENCY; ELECTRICAL GENERATION; ELECTRON HEATING; ELECTRON MEAN ENERGY; HEATING MODE; HIGH ELECTRIC FIELDS; HIGH VOLTAGE; IONIZATION DYNAMICS; IONIZATION RATES; LOW DENSITY; MEAN ENERGY; MODE OPERATION; PARTICLE-IN-CELL SIMULATIONS; PLASMA BULK; RF CURRENTS; SELF-BIAS; SPACE AND TIME;

ARGON; CHEMICAL BONDS; ELECTRIC FIELDS; ELECTRONEGATIVITY; ELECTRONS; IONIZATION OF GASES; MATHEMATICAL MODELS; PHASE SHIFT; PLASMA HEATING; QUALITY CONTROL;

ELECTRIC DISCHARGES;

EID: 80051652169     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/4/045008     Document Type: Article

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