The electrical asymmetry effect in capacitively coupled radio-frequency discharges

Plasma Sources Science and Technology

Volumn 20, Issue 2, 2011, Pages

  Czarnetzki, U ^a   Schulze, J ^a,b   Schungel E ^a   Donko Z ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL EXPRESSIONS; ANALYTICAL MODEL; CAPACITIVELY COUPLED; DIFFERENT FREQUENCY; DISCHARGE CURRENTS; DISCHARGE TYPES; DRIVING FREQUENCIES; DUAL FREQUENCY; FUNDAMENTAL FREQUENCIES; ION ENERGIES; MODEL RESULTS; MODELING RESULTS; MULTI FREQUENCY; NON-LINEAR; NON-LINEARITY; PLASMA PARAMETER; PLASMA SERIES RESONANCE; RADIO FREQUENCIES; RADIO FREQUENCY DISCHARGES; RF CURRENTS; SELF - EXCITED; SELF-BIAS;

DC POWER TRANSMISSION; MATHEMATICAL MODELS; PHASE SHIFT;

ELECTRIC DISCHARGES;

EID: 79953695347     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/2/024010     Document Type: Article

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