Analysis of a capacitively coupled dual-frequency CF4 discharge

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 10 B, 2006, Pages 8151-8156

  Donko Z ^a   Petrovic Z Lj ^b  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Discharge simulation; Dual frequency RF discharges; Reactive plasmas

Indexed keywords

BIAS CURRENTS; CAPACITANCE; COMPUTER SIMULATION; OPTIMIZATION; PLASMA THEORY;

DISCHARGE SIMULATION; DUAL-FREQUENCY RF DISCHARGES; REACTIVE PLASMAS;

ELECTRIC DISCHARGES;

EID: 34248638705     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.8151     Document Type: Article

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