Mass-resolved ion energy measurements at both electrodes of a 13.56 MHz plasma in CF4

Journal of Applied Physics

Volumn 79, Issue 12, 1996, Pages 8982-8992

  Snijkers, R J M M ^a   Van Sambeek, M J M ^a   Hoppenbrouwers, M B ^a   Kroesen, G M W ^a   De Hoog, F J ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001204414     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362630     Document Type: Article

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