Ion energy cost in a combined inductive-capacitive rf discharge

Technical Physics Letters

Volumn 24, Issue 11, 1998, Pages 881-883

  Dudin, S V ^a   Zykov, A V ^a   Polozhii K I ^a   Farenik, V I ^a  

^a V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032351960     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1262301     Document Type: Article

References (23)

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