The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

Plasma Sources Science and Technology

Volumn 20, Issue 1, 2011, Pages

  Schulze, J ^a,b   Schungel E ^b   Donko Z ^a   Czarnetzki, U ^b  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; APPLIED VOLTAGES; CAPACITIVELY COUPLED; DUAL FREQUENCY; FLOATING POTENTIALS; ION ENERGIES; ION FLUXES; MULTI FREQUENCY; PARTICLE-IN-CELL SIMULATIONS; PIC SIMULATION; PLASMA BULK; RADIO FREQUENCY DISCHARGES; SELF-BIAS; SYMMETRY PARAMETER; VOLTAGE DROP; VOLTAGE HARMONICS;

BIAS VOLTAGE; ELECTRIC DISCHARGES; IONS; MATHEMATICAL MODELS; RADIO; RADIO WAVES;

COMPUTER SIMULATION;

EID: 79551699418     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/1/015017     Document Type: Article

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