Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

Applied Physics Letters

Volumn 94, Issue 13, 2009, Pages

  Donko Z ^a   Schulze, J ^b   Czarnetzki, U ^b   Luggenholscher D ^b  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVELY COUPLED; DRIVING FREQUENCIES; DRIVING VOLTAGES; DUAL FREQUENCIES; ELECTRICAL DISCHARGES; ELECTRON HEATING; HIGH FREQUENCIES; LOW PRESSURES; PARTICLE -IN-CELL SIMULATIONS; PHASE DIFFERENCES; PLASMA SERIES RESONANCES; RADIO FREQUENCY DISCHARGES; SELF - EXCITED;

HEATING; MOTION ESTIMATION; PLASMAS; RADIO; RADIO WAVES; RESONANCE;

ELECTRIC DISCHARGES;

EID: 64149097586     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3110056     Document Type: Article

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