Spectroscopic measurements of phase-resolved electron energy distribution functions in RF-excited discharges

Europhysics Letters

Volumn 66, Issue 2, 2004, Pages 232-238

  Gans, T ^a   Schulz Von Der Gathen, V ^b   Dobele H F ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2142717287     PISSN: 02955075     EISSN: None     Source Type: Journal    
DOI: 10.1209/epl/i2003-10183-2     Document Type: Article

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