The Electrical Asymmetry Effect - A novel and simple method for separate control of ion energy and flux in capacitively coupled RF discharges

Journal of Physics: Conference Series

Volumn 162, Issue , 2009, Pages

  Czarnetzki, U ^a   Heil, G ^a,c   Schulze, J ^a   Donko Z ^b   Mussenbrock, T ^a   Brinkmann, P ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^c Richardt Patents and Trademarks   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 67650837961     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/162/1/012010     Document Type: Article

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