Probability theory of electron-molecule, ion-molecule, molecule-molecule, and Coulomb collisions for particle modeling of materials processing plasmas and gases

IEEE Transactions on Plasma Science

Volumn 28, Issue 3, 2000, Pages 971-990

  Nanbu, Kenichi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ELECTRONS; GASES; IONS; MOLECULES; MONTE CARLO METHODS; PROBABILITY DISTRIBUTIONS;

COLLISION ALGORITHM; COULOMB COLLISION; PARTICLE SIMULATION METHOD;

PLASMA DENSITY;

EID: 0034197672     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.887765     Document Type: Article

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