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Volumn 43, Issue 22, 2010, Pages
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Charge dynamics in capacitively coupled radio frequency discharges
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Author keywords
[No Author keywords available]
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Indexed keywords
ANALYTICAL MODEL;
CAPACITIVELY COUPLED;
CHARGE DYNAMICS;
DRIVING VOLTAGES;
DUAL FREQUENCY;
ELECTRON FLUX;
ION FLUXES;
LOW FREQUENCY;
LOW PRESSURES;
NEGATIVE CHARGE;
NON-LINEAR;
ON TIME;
PIC SIMULATION;
RADIO FREQUENCIES;
RADIO FREQUENCY DISCHARGES;
RF CURRENTS;
SELF EXCITATION;
SELF-BIAS;
TIME AVERAGES;
TIME DEPENDENT;
VARIABLE PHASE;
ARGON;
COMPUTER SIMULATION;
DYNAMICS;
MATHEMATICAL MODELS;
MODELS;
PHASE SHIFT;
RADIO;
RADIO WAVES;
ELECTRIC DISCHARGES;
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EID: 77952801208
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/43/22/225201 Document Type: Article |
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Times cited : (53)
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References (53)
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