Different modes of electron heating in dual-frequency capacitively coupled radio frequency discharges

Plasma Sources Science and Technology

Volumn 18, Issue 3, 2009, Pages

  Schulze, J ^a   Donko Z ^b   Luggenholscher D ^a   Czarnetzki, U ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; CAPACITIVELY COUPLED; CROSS SECTION; DIFFERENT MODES; DUAL FREQUENCY; ELECTRON HEATING; ENERGETIC ELECTRON; EXCITATION DYNAMICS; FIELD REVERSAL; FREQUENCY COUPLING; GAS PRESSURES; GAS SPECIES; HIGH PRESSURE; ION DENSITY; MODE OPERATION; PARAMETER SET; PARTICLE-IN-CELL SIMULATIONS; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY; RADIO FREQUENCIES; RADIO FREQUENCY DISCHARGES; SECONDARY ELECTRONS; SINGLE-FREQUENCY; SPATIOTEMPORAL DISTRIBUTIONS; SYSTEMATIC STUDY; TEMPORAL MODULATIONS;

CELL MEMBRANES; COUPLED CIRCUITS; ELECTRONS; EMISSION SPECTROSCOPY; IONIZATION OF GASES; LIGHT TRANSMISSION; OPTICAL EMISSION SPECTROSCOPY; PLASMA HEATING; RADIO; RADIO WAVES;

DENSITY OF GASES;

EID: 68549136765     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/3/034011     Document Type: Article

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