Transport coefficients and scattering cross-sections for plasma modelling in CF4-Ar mixtures: A swarm analysis

Journal of Physics D: Applied Physics

Volumn 33, Issue 17, 2000, Pages 2146-2153

  Kurihara, Masaru ^a   Petrović, Zoran Lj ^a,b   Makabe, Toshiaki ^a  

^a KEIO UNIVERSITY   (Japan)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BINARY MIXTURES; DISSOCIATION; ELECTRON SCATTERING; ELECTRON TRANSPORT PROPERTIES; FLUOROCARBONS; IONIZATION OF GASES; MATHEMATICAL MODELS; REACTION KINETICS;

BOLTZMANN EQUATION; ELECTRON TRANSPORT COEFFICIENTS; PLASMA MODELS;

PLASMAS;

EID: 0034274910     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/17/309     Document Type: Article

References (66)

1. Nakamura Y 1991 Gaseous Electronics and Their Applications ed R W Crompton et al (Tokyo: KTK Scientific) pp 178-200 Nakamura Y Private communication
2. Nakamura Y 1991 Gaseous Electronics and Their Applications ed R W Crompton et al (Tokyo: KTK Scientific) pp 178-200 Nakamura Y Private communication
3. Kushner M J, Collison W Z, Grapperhaus M J, Holland J P and Barnes M S 1996 J. Appl. Phys. 80 1337 Rauf S and Kushner M J 1997 J. Appl. Phys. 81 5966 Rauf S and Kushner M J 1999 J. Vac. Sci. Technol. A 17 704
4. Kushner M J, Collison W Z, Grapperhaus M J, Holland J P and Barnes M S 1996 J. Appl. Phys. 80 1337 Rauf S and Kushner M J 1997 J. Appl. Phys. 81 5966 Rauf S and Kushner M J 1999 J. Vac. Sci. Technol. A 17 704
5. Kushner M J, Collison W Z, Grapperhaus M J, Holland J P and Barnes M S 1996 J. Appl. Phys. 80 1337 Rauf S and Kushner M J 1997 J. Appl. Phys. 81 5966 Rauf S and Kushner M J 1999 J. Vac. Sci. Technol. A 17 704
6. Maeshige K, Hasebe M, Nakano N, Yamaguchi Y and Makabe T 2000 J. Appl. Phys. at press
7. Phelps A V 1997 Invited lecture 50th Gaseous Electronics Conference (GEC) (Wisconsin, Madison, USA, 1997) See also [5]
8. Phelps A V and Petrović Z Lj 1999 Plasma Sources Sci. Technol. 8 R21
9. Huxley L G H and Crompton R W 1973 The Drift and Diffusion of Electrons in Gases (New York: Wiley Interscience)
10. Petrović Z Lj 1999 Invited lecture Int. Symp. on Electron-Molecule Collisions and Swarms (a satellite of XXI ICPEAC) (Tokyo, Japan, 18-20 July 1999) ed Y Hatano et al pp 19-22 Makabe T 1999 ibid pp 72-6
11. Petrović Z Lj 1999 Invited lecture Int. Symp. on Electron-Molecule Collisions and Swarms (a satellite of XXI ICPEAC) (Tokyo, Japan, 18-20 July 1999) ed Y Hatano et al pp 19-22 Makabe T 1999 ibid pp 72-6
12. Segur P, Yousfi M and Bordage M C 1984 J. Phys. D: Appl. Phys. 17 2199 Penetrante B M, Bardsley J N and Pitchford L C 1985 J. Phys. D: Appl. Phys. 18 1087 Reid I D 1979 Aust. J. Phys. 32 231 Nolan A M, Brennan M J, Ness K F and Wedding A B 1997 J. Phys. D: Appl. Phys. 30 2865 White R D, Brennan M J and Ness K F 1997 J. Phys. D: Appl. Phys. 30 810
13. Segur P, Yousfi M and Bordage M C 1984 J. Phys. D: Appl. Phys. 17 2199 Penetrante B M, Bardsley J N and Pitchford L C 1985 J. Phys. D: Appl. Phys. 18 1087 Reid I D 1979 Aust. J. Phys. 32 231 Nolan A M, Brennan M J, Ness K F and Wedding A B 1997 J. Phys. D: Appl. Phys. 30 2865 White R D, Brennan M J and Ness K F 1997 J. Phys. D: Appl. Phys. 30 810
14. Segur P, Yousfi M and Bordage M C 1984 J. Phys. D: Appl. Phys. 17 2199 Penetrante B M, Bardsley J N and Pitchford L C 1985 J. Phys. D: Appl. Phys. 18 1087 Reid I D 1979 Aust. J. Phys. 32 231 Nolan A M, Brennan M J, Ness K F and Wedding A B 1997 J. Phys. D: Appl. Phys. 30 2865 White R D, Brennan M J and Ness K F 1997 J. Phys. D: Appl. Phys. 30 810
15. Segur P, Yousfi M and Bordage M C 1984 J. Phys. D: Appl. Phys. 17 2199 Penetrante B M, Bardsley J N and Pitchford L C 1985 J. Phys. D: Appl. Phys. 18 1087 Reid I D 1979 Aust. J. Phys. 32 231 Nolan A M, Brennan M J, Ness K F and Wedding A B 1997 J. Phys. D: Appl. Phys. 30 2865 White R D, Brennan M J and Ness K F 1997 J. Phys. D: Appl. Phys. 30 810
16. Segur P, Yousfi M and Bordage M C 1984 J. Phys. D: Appl. Phys. 17 2199 Penetrante B M, Bardsley J N and Pitchford L C 1985 J. Phys. D: Appl. Phys. 18 1087 Reid I D 1979 Aust. J. Phys. 32 231 Nolan A M, Brennan M J, Ness K F and Wedding A B 1997 J. Phys. D: Appl. Phys. 30 2865 White R D, Brennan M J and Ness K F 1997 J. Phys. D: Appl. Phys. 30 810
17. Maeda K and Makabe T 1994 Jpn. J. Appl. Phys. 33 4173 Maeda K and Makabe T 1994 Phys. Scripta T 53 61
18. Maeda K and Makabe T 1994 Jpn. J. Appl. Phys. 33 4173 Maeda K and Makabe T 1994 Phys. Scripta T 53 61
19. Raspopović Z M, Sakadžić S, Bzenić S A and Petrovicć Z Lj 1999 IEEE Trans. Plasma Sci. 27 1241
20. Surendra M 1995 Plasma Sources Sci. Technol. 4 56
21. Shimura N and Makabe T 1992 J. Phys. D: Appl. Phys. 25 751
22. Ohmori Y, Kitamori K, Shimozuma M and Tagashira H 1986 J. Phys. D: Appl. Phys. 19 437
23. Verboncoeur J P, Parker G J, Penetrante B M and Morgan W L 1996 J. Appl. Phys. 80 1299
24. Maeda K, Makabe T, Nakano N, Bzenić S and Petrović Z Lj 1997 Phys. Rev. E 55 5901
25. Okazaki K, Makabe T and Yamaguchi Y 1989 Appl Phys. Lett. 54 1742 Makabe T, Nakano N and Yamaguchi Y 1992 Phys. Rev. A 45 2520
26. Okazaki K, Makabe T and Yamaguchi Y 1989 Appl Phys. Lett. 54 1742 Makabe T, Nakano N and Yamaguchi Y 1992 Phys. Rev. A 45 2520
27. Nakano N, Shimura N, Petrović Z Lj and Makabe T 1994 Phys. Rev. E. 49 4455
28. Nakano T and Samukawa S 1999 J. Vac. Sci. Technol. A 17 686 Samukawa S and Nakano T 1999 J. Vac. Sci. Technol. A 17 500 Nagatsu M, Ganashev I, Monta S and Sugai H 1998 Jpn. J. Appl. Phys. 37 2406
29. Nakano T and Samukawa S 1999 J. Vac. Sci. Technol. A 17 686 Samukawa S and Nakano T 1999 J. Vac. Sci. Technol. A 17 500 Nagatsu M, Ganashev I, Monta S and Sugai H 1998 Jpn. J. Appl. Phys. 37 2406
30. Nakano T and Samukawa S 1999 J. Vac. Sci. Technol. A 17 686 Samukawa S and Nakano T 1999 J. Vac. Sci. Technol. A 17 500 Nagatsu M, Ganashev I, Monta S and Sugai H 1998 Jpn. J. Appl. Phys. 37 2406
31. Kitajima T, Takeo T, Petrović Z Lj and Makabe T 2000 Appl. Phys. Lett. 77 489 McMillin B K and Zachariah M R 1996 J. Appl. Phys. 79 77
32. Kitajima T, Takeo T, Petrović Z Lj and Makabe T 2000 Appl. Phys. Lett. 77 489 McMillin B K and Zachariah M R 1996 J. Appl. Phys. 79 77
33. Hioki K, Hirata H, Nakano N, Petrović Z Lj and Makabe T 2000 J. Vac. Sci. Technol. A 18 864
34. Gogolides E, Stathakopoulos M and Boudouvis A 1994 J. Phys. D: Appl. Phys. 27 1878 Mantzaris N V, Boudouvis A and Gogolides E 1995 J. Appl. Phys. 77 6169 Rauf S and Kushner M J 1997 J. Appl. Phys. 81 2805 Ventzek P L, Hoekstra R J and Kushner M J 1994 J. Vac. Sci. Technol. B 12 461
35. Gogolides E, Stathakopoulos M and Boudouvis A 1994 J. Phys. D: Appl. Phys. 27 1878 Mantzaris N V, Boudouvis A and Gogolides E 1995 J. Appl. Phys. 77 6169 Rauf S and Kushner M J 1997 J. Appl. Phys. 81 2805 Ventzek P L, Hoekstra R J and Kushner M J 1994 J. Vac. Sci. Technol. B 12 461
36. Gogolides E, Stathakopoulos M and Boudouvis A 1994 J. Phys. D: Appl. Phys. 27 1878 Mantzaris N V, Boudouvis A and Gogolides E 1995 J. Appl. Phys. 77 6169 Rauf S and Kushner M J 1997 J. Appl. Phys. 81 2805 Ventzek P L, Hoekstra R J and Kushner M J 1994 J. Vac. Sci. Technol. B 12 461
37. Gogolides E, Stathakopoulos M and Boudouvis A 1994 J. Phys. D: Appl. Phys. 27 1878 Mantzaris N V, Boudouvis A and Gogolides E 1995 J. Appl. Phys. 77 6169 Rauf S and Kushner M J 1997 J. Appl. Phys. 81 2805 Ventzek P L, Hoekstra R J and Kushner M J 1994 J. Vac. Sci. Technol. B 12 461
38. Bzenić S A, Manola S S and Petrović Z Lj 1995 25th European Microwave Conference (Bologna, 1995) (Swanley: Nexus) pp 856-8
39. Kumar K, Skullerud H R and Robson R E 1980 Aust. J. Phys. 33 343 Vrhovac S B and Petrović Z Lj 1999 Aust. J. Phys. 52 999
40. Kumar K, Skullerud H R and Robson R E 1980 Aust. J. Phys. 33 343 Vrhovac S B and Petrović Z Lj 1999 Aust. J. Phys. 52 999
41. Maeda K, Makabe T, Nakano N, Bzenić S and Petrović Z Lj 1991 Phys, Rev. E 55 5901
42. Maeda K 1995 Private communication
43. Christophorou L G, Olthoff J K and Rao M V V S 1996 J. Phys. Chem. Ref. Data 25 1341 Hunter S R, Carter J G and Christophorou L G 1987 J. Chem. Phys. 86 693
44. Christophorou L G, Olthoff J K and Rao M V V S 1996 J. Phys. Chem. Ref. Data 25 1341 Hunter S R, Carter J G and Christophorou L G 1987 J. Chem. Phys. 86 693
45. Morgan W L 1992 Plasma Chem. Plasma Process. 12 477
46. Hayashi M 1987 Swarm Studies and Inelastic Electron-Molecule Collisions ed L C Pitchford et al (New York: Springer) pp 167-87
47. Stefanov B and Pirgov P 1993 Plasma Chem. Plasma Process. 13 655 Hunter S R, Carter J G and Christophorou L G 1985 J. Appl. Phys. 58 3001 Lisovskiy V A and Yegorenkov V D 1999 J. Phys. D: Appl. Phys. 32 2645
48. Stefanov B and Pirgov P 1993 Plasma Chem. Plasma Process. 13 655 Hunter S R, Carter J G and Christophorou L G 1985 J. Appl. Phys. 58 3001 Lisovskiy V A and Yegorenkov V D 1999 J. Phys. D: Appl. Phys. 32 2645
49. Stefanov B and Pirgov P 1993 Plasma Chem. Plasma Process. 13 655 Hunter S R, Carter J G and Christophorou L G 1985 J. Appl. Phys. 58 3001 Lisovskiy V A and Yegorenkov V D 1999 J. Phys. D: Appl. Phys. 32 2645
50. Bordage M C, Segur P and Chioki A 1996 J. Appl. Phys. 80 1325
51. Nakano T and Sugai H 1992 Jpn. J. Appl. Phys. 31 2919
52. Stephan K, Deutsch H and Maerk T 1985 J. Chem. Phys. 83 5712
53. Maerk T and Dunn G 1985 Electron Impact Ionzation (Wien: Springer)
54. Vasenkov A V 1999 Phys. Lett. A 258 149
55. Bordage M C, Segur P, Christophoprou L G and Olthoff J K 1999 J. Appl. Phys. 86 3558
56. Long W H, Bailey W F and Garscadden A 1976 Phys. Rev. A 13 471 Lopantseva G B, Pal' A F, Persiatsev I G, Polushkin V M, Starostin A N, Timofeef M A and Treneva E G 1979 Sov. J. Plasma Phys. 5 767 Aleksandrov N L, Konchakov A M, Napartovich A P and Starostin A N 1989 Sov. Phys. JETP 68 933 Shizgal B 1990 Chem. Phys. 147 271
57. Long W H, Bailey W F and Garscadden A 1976 Phys. Rev. A 13 471 Lopantseva G B, Pal' A F, Persiatsev I G, Polushkin V M, Starostin A N, Timofeef M A and Treneva E G 1979 Sov. J. Plasma Phys. 5 767 Aleksandrov N L, Konchakov A M, Napartovich A P and Starostin A N 1989 Sov. Phys. JETP 68 933 Shizgal B 1990 Chem. Phys. 147 271
58. Long W H, Bailey W F and Garscadden A 1976 Phys. Rev. A 13 471 Lopantseva G B, Pal' A F, Persiatsev I G, Polushkin V M, Starostin A N, Timofeef M A and Treneva E G 1979 Sov. J. Plasma Phys. 5 767 Aleksandrov N L, Konchakov A M, Napartovich A P and Starostin A N 1989 Sov. Phys. JETP 68 933 Shizgal B 1990 Chem. Phys. 147 271
59. Long W H, Bailey W F and Garscadden A 1976 Phys. Rev. A 13 471 Lopantseva G B, Pal' A F, Persiatsev I G, Polushkin V M, Starostin A N, Timofeef M A and Treneva E G 1979 Sov. J. Plasma Phys. 5 767 Aleksandrov N L, Konchakov A M, Napartovich A P and Starostin A N 1989 Sov. Phys. JETP 68 933 Shizgal B 1990 Chem. Phys. 147 271
60. Petrović Z Lj, Crompton R W and Haddad G N 1984 Aust. J. Phys. 37 23 Robson R E 1984 Aust. J. Phys. 37 35 Vrhovac S B and Petrović Z Lj 1996 Phys. Rev. A 53 4012
61. Petrović Z Lj, Crompton R W and Haddad G N 1984 Aust. J. Phys. 37 23 Robson R E 1984 Aust. J. Phys. 37 35 Vrhovac S B and Petrović Z Lj 1996 Phys. Rev. A 53 4012
62. Petrović Z Lj, Crompton R W and Haddad G N 1984 Aust. J. Phys. 37 23 Robson R E 1984 Aust. J. Phys. 37 35 Vrhovac S B and Petrović Z Lj 1996 Phys. Rev. A 53 4012
63. Jelenak A, Jovanović J V, Bzenić S A, Vrhovac S B, Manola S S, Tomčik B and Petrović Z Lj 1995 Diam. Relat. Mater. 4 1103 Petrović Z Lj, Jovanović J V, Raspopović Z M, Bzenić S A and Vrhovac S B 1997 Aust. J. Phys. 50 591 Bzenić S A, Petrović Z Lj, Raspopović Z M and Makabe T 1999 Jpn. J. Appl. Phys. 38 6077
64. Jelenak A, Jovanović J V, Bzenić S A, Vrhovac S B, Manola S S, Tomčik B and Petrović Z Lj 1995 Diam. Relat. Mater. 4 1103 Petrović Z Lj, Jovanović J V, Raspopović Z M, Bzenić S A and Vrhovac S B 1997 Aust. J. Phys. 50 591 Bzenić S A, Petrović Z Lj, Raspopović Z M and Makabe T 1999 Jpn. J. Appl. Phys. 38 6077
65. Jelenak A, Jovanović J V, Bzenić S A, Vrhovac S B, Manola S S, Tomčik B and Petrović Z Lj 1995 Diam. Relat. Mater. 4 1103 Petrović Z Lj, Jovanović J V, Raspopović Z M, Bzenić S A and Vrhovac S B 1997 Aust. J. Phys. 50 591 Bzenić S A, Petrović Z Lj, Raspopović Z M and Makabe T 1999 Jpn. J. Appl. Phys. 38 6077
66. Raspopović Z M, Sakadžić S, Makabe T and Petrović Z Lj 2000 J. Phys. D: Appl. Phys. 33 1298