메뉴 건너뛰기




Volumn 95, Issue 3, 2004, Pages 870-876

Functional separation in two frequency operation of an inductively coupled plasma

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMS; CARRIER CONCENTRATION; ELECTRIC POTENTIAL; ELECTRODES; EMISSION SPECTROSCOPY; FLUORINE COMPOUNDS; FREQUENCIES; GROUND STATE; MICROWAVE MEASUREMENT; PRESSURE EFFECTS; SEMICONDUCTOR LASERS;

EID: 1142304540     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1636527     Document Type: Article
Times cited : (65)

References (26)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.