-
3
-
-
0000934011
-
-
Surendra M, Graves D B and Jellum G M 1990 Phys. Rev. A 41 1112. These authors do not document tests of this set against experimental ionization and transport swarm data. One of us (AVP) has constructed a cross section set from the published graphs and finds that the calculated ionization coefficients are a factor of two too low and a factor of three too high compared to experiment at E/n of 30 and 1000 Td, respectively. One of the authors of this paper found records of a few calculations that are about 60% of our values.
-
(1990)
Phys. Rev. A
, vol.41
, pp. 1112
-
-
Surendra, M.1
Graves, D.B.2
Jellum, G.M.3
-
6
-
-
0030490409
-
-
Serikov V V and Nanbu K 1996 J. Vac. Sci. Technol. A 14 3108 Serikov V V and Nanbu K 1997 J. Appl. Phys. 82 5948. We thank Professor Nanbu for providing details of their viscosity cross sections that resulted in corrections to our original cross sections for Ar-Ar elastic collisions at low energies. See [27].
-
(1996)
J. Vac. Sci. Technol. A
, vol.14
, pp. 3108
-
-
Serikov, V.V.1
Nanbu, K.2
-
7
-
-
0031374015
-
-
Serikov V V and Nanbu K 1996 J. Vac. Sci. Technol. A 14 3108 Serikov V V and Nanbu K 1997 J. Appl. Phys. 82 5948. We thank Professor Nanbu for providing details of their viscosity cross sections that resulted in corrections to our original cross sections for Ar-Ar elastic collisions at low energies. See [27].
-
(1997)
J. Appl. Phys.
, vol.82
, pp. 5948
-
-
Serikov, V.V.1
Nanbu, K.2
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12
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0345198471
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Pak H and Kushner M J 1990 Appl. Phys. Lett. 57 1619 Sommerer T J, Pak H and Kushner M J 1992 J. Appl. Phys. 72 3374
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(1990)
Appl. Phys. Lett.
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, pp. 1619
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Pak, H.1
Kushner, M.J.2
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15
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0009618062
-
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Boeuf J P and Pitchford L C 1991 IEEE Trans. Plasma Sci. 19 286 Alberta M P, Derouard J, Pitchford L C, Quadoudi N and Boeuf J P 1994 Phys. Rev. E 50 2239
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(1994)
Phys. Rev. E
, vol.50
, pp. 2239
-
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Alberta, M.P.1
Derouard, J.2
Pitchford, L.C.3
Quadoudi, N.4
Boeuf, J.P.5
-
16
-
-
0013383002
-
-
Conde C A N, Santos M C M, Fátima M, Ferreira A and Sousa C A 1975 IEEE Trans. Nucl. Sci. 22 104 Santos F P, Dias T H V T, Rachinhas P J B M, Stauffer A D and Conde C A N 1998 IEEE Trans. Nucl. Sci. 45 176
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(1975)
IEEE Trans. Nucl. Sci.
, vol.22
, pp. 104
-
-
Conde, C.A.N.1
Santos, M.C.M.2
Fátima, M.3
Ferreira, A.4
Sousa, C.A.5
-
17
-
-
0032048433
-
-
Conde C A N, Santos M C M, Fátima M, Ferreira A and Sousa C A 1975 IEEE Trans. Nucl. Sci. 22 104 Santos F P, Dias T H V T, Rachinhas P J B M, Stauffer A D and Conde C A N 1998 IEEE Trans. Nucl. Sci. 45 176
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(1998)
IEEE Trans. Nucl. Sci.
, vol.45
, pp. 176
-
-
Santos, F.P.1
Dias, T.H.V.T.2
Rachinhas, P.J.B.M.3
Stauffer, A.D.4
Conde, C.A.N.5
-
20
-
-
0000267513
-
-
Tachibana K 1986 Phys. Rev. A 34 1007. This paper documents tests of this electron-Ar cross section set against experimental metastable and ion production coefficients and transport data. This rather detailed cross section set (eight levels) is apparently not available on the internet.
-
(1986)
Phys. Rev. A
, vol.34
, pp. 1007
-
-
Tachibana, K.1
-
21
-
-
0022873979
-
-
Puech V and Torchin L 1986 J. Phys. D: Appl. Phys. 19 2309. This paper documents tests of this very complete set of electron-Ar cross sections (≈30 levels) against experimental ionization, excitation and transport swarm data. Unfortunately, this highly recommended cross section set is not available on the internet.
-
(1986)
J. Phys. D: Appl. Phys.
, vol.19
, pp. 2309
-
-
Puech, V.1
Torchin, L.2
-
22
-
-
0344335928
-
-
unpublished
-
Hayashi M 1990 unpublished. This set of 25 cross sections for electrons in Ar has been found to be consistent with swarm experiments. Contact Z Lj Petrović for details on these tests and regarding the associated compilation of excited state and transport data.
-
(1990)
-
-
Hayashi, M.1
-
24
-
-
0344767930
-
-
unpublished. on the 'Atomic physics' page under the subject 'Collision data' or at ftp://jila.Colorado.edu/collision_data
-
Phelps A V 1999 unpublished. These data are available via the JILA web site at http://jilawww.Colorado.edu/ on the 'Atomic physics' page under the subject 'Collision data' or at ftp://jila.Colorado.edu/collision_data. The file electron. txt also documents tests of calculated coefficients against experimental ionization and transport data from swarm experiments. Other files list recommended heavy-particle collision data.
-
(1999)
-
-
Phelps, A.V.1
-
25
-
-
0026961570
-
-
Morgan W L 1992 Plasma Chem. Plasma Proc. 12 449 Morgan W L 1992 Plasma Chem. Plasma Proc. 12 477. This simplified cross section set is available for Ar and other gases from The Siglo Data Base, CPAT and Kinema Software at http://www.sni.net/siglo.
-
(1992)
Plasma Chem. Plasma Proc.
, vol.12
, pp. 449
-
-
Morgan, W.L.1
-
26
-
-
0027004853
-
-
Morgan W L 1992 Plasma Chem. Plasma Proc. 12 449 Morgan W L 1992 Plasma Chem. Plasma Proc. 12 477. This simplified cross section set is available for Ar and other gases from The Siglo Data Base, CPAT and Kinema Software at http://www.sni.net/siglo.
-
(1992)
Plasma Chem. Plasma Proc.
, vol.12
, pp. 477
-
-
Morgan, W.L.1
-
27
-
-
0000226301
-
-
Fiala A, Pitchford L C and Boeuf J P 1994 Phys. Rev. E 49 5607. According to the web site in [21], the cross section set for electrons in Ar used in this paper has been revised (1998) to be consistent with electron swarm experiments.
-
(1994)
Phys. Rev. E
, vol.49
, pp. 5607
-
-
Fiala, A.1
Pitchford, L.C.2
Boeuf, J.P.3
-
28
-
-
0030172897
-
-
i values are significantly larger than the values expected for sputtered Cu from the data shown in figure 3.
-
(1996)
Vacuum
, vol.47
, pp. 1031
-
-
Nanbu, K.1
Kageyama, J.2
-
30
-
-
0344335923
-
-
private communication
-
i values are significantly larger than the values expected for sputtered Cu from the data shown in figure 3.
-
(1998)
-
-
Nanbu, K.1
-
31
-
-
79960089540
-
-
Vasenkov A V 1998 Phys. Rev. E 57 2212. This cross section set is designed for application to models of high energy electron beams, rather than electric discharges. Tests of calculated quantities such as the mean energy per ion pair and electron range are presented. No tests of electron transport and ionization coefficients are given.
-
(1998)
Phys. Rev. E
, vol.57
, pp. 2212
-
-
Vasenkov, A.V.1
-
32
-
-
0345198465
-
-
Phelps A V 1997 Bull. Am. Phys. Soc. 42 1721. Here it is strongly advocated that each publication and internet site that makes electron cross section sets available for modelling gas discharges provide documentation of the tests that have been made of the consistency of the cross section set with simple swarm experiments, such a spatial (Townsend) ionization coefficients, drift velocity and the ratio of the diffusion to mobility coefficients. Such a procedure would reduce the number of inconsistent sets in circulation and reduce the tendency of some modellers to attribute discrepancies between complex models and experiment to errors in the electron cross sections.
-
(1997)
Bull. Am. Phys. Soc.
, vol.42
, pp. 1721
-
-
Phelps, A.V.1
-
33
-
-
84902437525
-
-
Phelps A V 1991 J. Phys. Chem. Ref. Data 20 557. It should be noted that in the absence of more detailed data the inelastic cross sections in this and the associated series of papers should be used with a differential scattering cross section sharply peaked in the forward direction, as is typical of high energy collisions. An isotropic inelastic scattering model for the inelastic collisions leads to excessive angular scattering and much larger contribution to the momentum transfer than was intended.
-
(1991)
J. Phys. Chem. Ref. Data
, vol.20
, pp. 557
-
-
Phelps, A.V.1
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34
-
-
36449005458
-
-
+ with Ar. For example, very recently Zhong X X, Wu J D, Wu C Z and Li F M 1993 J. Appl. Phys. 83 5069 have overestimated the isotropic component of the ion scattering at 100 eV by more than an order of magnitude.
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(1994)
Appl. Phys.
, vol.76
, pp. 747
-
-
Phelps, A.V.1
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35
-
-
0342394320
-
-
+ with Ar. For example, very recently Zhong X X, Wu J D, Wu C Z and Li F M 1993 J. Appl. Phys. 83 5069 have overestimated the isotropic component of the ion scattering at 100 eV by more than an order of magnitude.
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(1993)
J. Appl. Phys.
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, pp. 5069
-
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Zhong, X.X.1
Wu, J.D.2
Wu, C.Z.3
Li, F.M.4
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36
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36149026041
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Holstein T 1947 Phys. Rev. 72 1212 Holstein T 1951 Phys. Rev. 83 1159
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Holstein T 1947 Phys. Rev. 72 1212 Holstein T 1951 Phys. Rev. 83 1159
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Holstein, T.1
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41
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Druyvesteyn M J and Penning F M 1940 Rev. Mod. Phys. 12 87. This paper also discusses surface preparation procedures used in gas discharge experiments.
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Penning, F.M.2
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ed S Flügge (Berlin: Springer)
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Little P F 1956 Handbuch der Physik vol 21, ed S Flügge (Berlin: Springer) p 574
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Little, P.F.1
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44
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ed J M Meek and J D Graggs (Chinchester: Wiley) ch 3
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Dutton J 1978 Electrical Breakdown of Gases ed J M Meek and J D Graggs (Chinchester: Wiley) ch 3
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Dutton, J.1
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46
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0345630476
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Raizer Yu P 1986 Tepolfiz. Vys. Temp. 24 984 (Engl. Transl. 1986 High Temp. (USSR) 24 744)
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High Temp. (USSR)
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49
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79960397022
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Abroyan I A, Eremeev M A and Petrov N N 1967 Usp. Fiz. Nauk 92 105 (Engl. Transl. 1967 Sov. Phys. Usp. 10 332)
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52
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Krebs K H 1968 Fortschr. Phys. 16 419 Krebs K H 1983 Vacuum 33 555
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Krebs, K.H.1
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0345417978
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Kadota K and Kaneko Y 1974 Japan. J. Appl. Phys. 13 1554. Polished, washed and outgassed at low temperatures. The surface was the first dynode of an electron multiplier.
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Kadota, K.1
Kaneko, Y.2
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66
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See, for example, Armour D G, Valisadeh H, Soliman F A H and Carter G 1984 Vacuum 34 295 Rickards J 1984 Vacuum 34 559
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Vacuum
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Armour, D.G.1
Valisadeh, H.2
Soliman, F.A.H.3
Carter, G.4
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67
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0021421973
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See, for example, Armour D G, Valisadeh H, Soliman F A H and Carter G 1984 Vacuum 34 295 Rickards J 1984 Vacuum 34 559
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Vacuum
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Rickards, J.1
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33646982338
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for measurements in He
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Townsend J S and Llewellyn Jones F 1933 Phil. Mag. 15 282. See Townsend J S and Yarnold G D 1934 Phil. Mag. 17 594 for measurements in He.
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Townsend, J.S.1
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75
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0344335920
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Ul'yanov K N 1970 Zh. Tech. Fiz. 40 2138 (Engl. Transl. 1971 Sov. Phys.-Tech. Phys. 15 1667) Ul'yanov K N and Tskhai A B 1981 Tepolfiz. Vys. Temp. 19 41 (Engl. Transl. 1981 High Temp. (USSR) 19 32)
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Ul'yanov, K.N.1
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Ul'yanov K N 1970 Zh. Tech. Fiz. 40 2138 (Engl. Transl. 1971 Sov. Phys.-Tech. Phys. 15 1667) Ul'yanov K N and Tskhai A B 1981 Tepolfiz. Vys. Temp. 19 41 (Engl. Transl. 1981 High Temp. (USSR) 19 32)
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0342892421
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Ul'yanov K N 1970 Zh. Tech. Fiz. 40 2138 (Engl. Transl. 1971 Sov. Phys.-Tech. Phys. 15 1667) Ul'yanov K N and Tskhai A B 1981 Tepolfiz. Vys. Temp. 19 41 (Engl. Transl. 1981 High Temp. (USSR) 19 32)
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Ul'yanov K N 1970 Zh. Tech. Fiz. 40 2138 (Engl. Transl. 1971 Sov. Phys.-Tech. Phys. 15 1667) Ul'yanov K N and Tskhai A B 1981 Tepolfiz. Vys. Temp. 19 41 (Engl. Transl. 1981 High Temp. (USSR) 19 32)
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Cleaning techniques for various elements have been summarized by Musket R G, McLean W, Colmenares C A, Makowiecki D M and Siekhaus W J 1982 Appl. Surf. Sci. 10 143; Grunze M, Ruppender H and Elshazly O 1988 J. Vac. Sci. Technol. A 6 1266. We thank a referee for pointing out these references.
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Musket, R.G.1
McLean, W.2
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Siekhaus, W.J.5
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88
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84909779716
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Cleaning techniques for various elements have been summarized by Musket R G, McLean W, Colmenares C A, Makowiecki D M and Siekhaus W J 1982 Appl. Surf. Sci. 10 143; Grunze M, Ruppender H and Elshazly O 1988 J. Vac. Sci. Technol. A 6 1266. We thank a referee for pointing out these references.
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J. Vac. Sci. Technol. A
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90
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0004669315
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Güntherschulze A 1930 Z. Phys. 62 600. Probably these data should be characterized as obtained using a discharge technique, rather than a beam technique. However, we have not been able to determine the appropriate E/n values and so have adopted the author's assignment of the incident ion energy. Copper targets cleaned by electron and ion bombardment.
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0344767920
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Berry, H.W.1
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108
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0345198446
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unpublished
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Hofer W 1983 unpublished. Cited in figure 3.3 of [43]. Cleaning procedure not given, but presumably similar to [71].
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Hofer, W.1
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0040612153
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Smith, S.J.7
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51249183083
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Schall, H.1
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0004320756
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Kempter, V.6
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114
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0142024270
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-
i values (0.009 to 0.04). The breakdown data were obtained with d = 1 cm. See Kruithof A A and Penning F M 1936 Physica 3 515.
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(1940)
Physica
, vol.7
, pp. 519
-
-
Kruithof, A.A.1
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115
-
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0001002407
-
-
i values (0.009 to 0.04). The breakdown data were obtained with d = 1 cm. See Kruithof A A and Penning F M 1936 Physica 3 515.
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(1936)
Physica
, vol.3
, pp. 515
-
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Kruithof, A.A.1
Penning, F.M.2
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0345630469
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unpublished
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i, ionization by fast atoms and electrons backscattered from the anode.
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Phelps, A.V.1
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0345630467
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Hornbeck J A 1951 Phys. Rev. 83 374. Here we are only interested in the technique, because the cathodes were coated with metal oxides.
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Molnar, J.P.1
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Breskin, A.1
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0030108398
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-1 Torr, where photoelectron feedback is expected to be small.
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Di Mauro, A.1
Nappi, E.2
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Biagi, S.F.7
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84982591043
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Felsch D and Pech P 1973 Beitr. Plasmaphys. 13 197 Felsch D and Pech P 1973 Beitr. Plasmaphys. 13 253. Electrodes were inductively heated to 1670 K for Mo and 1270 K for Ni and Fe. The cathode was then bombarded with ions from a glow discharge.
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(1973)
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, pp. 197
-
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Felsch, D.1
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Felsch D and Pech P 1973 Beitr. Plasmaphys. 13 197 Felsch D and Pech P 1973 Beitr. Plasmaphys. 13 253. Electrodes were inductively heated to 1670 K for Mo and 1270 K for Ni and Fe. The cathode was then bombarded with ions from a glow discharge.
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(1973)
Beitr. Plasmaphys.
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, pp. 253
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Felsch, D.1
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private communication
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Gallagher A C 1996 private communication
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Gallagher, A.C.1
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Changes in surfaces produced by sputtering are reviewed by Navinšek B 1976 Prog. Surf. Sci. 7 49
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Schade, R.1
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m should be (2m - 1)d/2q. [124] Nonequilibrium behaviour of the electrons is expected at breakdown and for low-current discharges for E/n > 3000 Td or pd < 0.3 Torr cm. The condition for equilibrium and for the applicability of the local field model is examined theoretically in many recent papers. See, for example, the reviews by Kolobov V I and Godyak V A 1995 IEEE Trans. Plasma Sci. 23 503 Kortshagen U, Busch C and Tsendin L D 1996 Plasma Sources Sci. Technol. 5 1. The experimental evidence for nonequilibrium is summarized in appendix A.
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m should be (2m - 1)d/2q. [124] Nonequilibrium behaviour of the electrons is expected at breakdown and for low-current discharges for E/n > 3000 Td or pd < 0.3 Torr cm. The condition for equilibrium and for the applicability of the local field model is examined theoretically in many recent papers. See, for example, the reviews by Kolobov V I and Godyak V A 1995 IEEE Trans. Plasma Sci. 23 503 Kortshagen U, Busch C and Tsendin L D 1996 Plasma Sources Sci. Technol. 5 1. The experimental evidence for nonequilibrium is summarized in appendix A.
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2. Deviations from the exponential growth predicted by a constant spatial ionization coefficient have been calculated by Hayashi in [152]
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+-Ar collisions calculated by these authors using the MC technique at their lower E/n are significantly larger than those calculated using the one-dimensional distribution of the present paper. This difference may be important for breakdown models at E/n near 3000 Td.
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0345630462
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note
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0343636307
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0344335908
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note
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0 metastable state where the potential curves [133] suggest no collisional coupling to lower levels at 300 K and experiments show two and three-body collision loss [165, 166]. Fortunately, only 25% of the electron excitation is to these levels [17]. Most, but not all, of our rate coefficients for the lower six levels agree with those given by Millet et al [134]. We have not examined the transient solutions for our eight-level or our four-level model.
-
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-
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170
-
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0344767914
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2d and approximately as 1/Δλ at wavelength shifts Δλ from +0.6 to +30 nm, as expected for dipole-dipole collisional broadening. Over most of this range the normalized absorption is about twice that predicted by dipole-dipole broadening theory used in our resonance-radiation transport model [28]. At wavelengths closer to line centre the limited data approach the theory.
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0344335909
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note
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The calculations presented in this paper were carried out using Mathematica 3.0 © on a 300 MHz personal computer and required about 25 s per E/n value.
-
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172
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0344335907
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note
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Details are available on request. Send email to avp@jila.Colorado.edu.
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174
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0041969375
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Avery L W, House L L and Skumanich A 1969 J. Quant. Spectrosc. Radiat. Transfer 9 519. From these calculations for a Doppler broadened profile, spatially uniform excitation, a finite cylinder with an axial optical depth at line centre of 100 and ratios of radius to length of 1:1 and 4:1, roughly 45% and 15% of the radiation is lost to the side wall. A collision-broadened line profile appropriate to breakdown in Ar, with its weaker dependence of photon transmission on distance, will presumably lead to somewhat larger losses to the side wall. For comparison, the corresponding losses by diffusion in the fundamental spatial mode are 37% and 13%.
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0345198440
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note
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For example, the determination of the steady-state breakdown and discharge maintenance pd at a given E/n would require interpolation between pd values for MC solutions yielding temporally growing and decaying discharge currents. Unfortunately, a recent application of MC techniques for a finite growth rate during pulsed breakdown appears to neglect the multiple avalanches required to observe breakdown [167]. The use of Monte Carlo techniques for the modelling of high current cathode fall discharges [5, 6] usually does not require multiple solutions because the nonlinear dependence of space-charge electric fields on current density means that one can often reach a steady-state current with an arbitrary choice of discharge voltage and pd.
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177
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0345630460
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note
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-10 instead of zero.
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84859582917
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