Anomalous Capacitive Sheath with Deep Radio-Frequency Electric-Field Penetration

Physical Review Letters

Volumn 89, Issue 26, 2002, Pages

  Kaganovich, Igor D ^a  

^a PRINCETON PLASMA PHYSICS LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COOLING; ELECTRIC FIELD EFFECTS; ELECTRON TRANSITIONS; PLASMA HEATING; PLASMA SHEATHS; REACTION KINETICS;

CAPACITIVE SHEATH; DEEP RADIO FREQUENCY ELECTRIC FIELD PENETRATION; THERMAL VELOCITY;

PLASMA THEORY;

EID: 0037164997     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.89.265006     Document Type: Article

References (17)

1. L.D. Landau, J. Phys. (Moscow)JOPYA6 10, 25 (1946).
2. V.A. Godyak, Sov. J. Plasma Phys. 2, 78 (1976).
3. M.A. Lieberman, IEEE Trans. Plasma Sci.10.1109/27.16552 16, 638 (1988).
4. M.A. Lieberman and V.A. Godyak, IEEE Trans. Plasma Sci.10.1109/27.700878 26, 955 (1998).
5. I.D. Kaganovich and L.D. Tsendin, IEEE Trans. Plasma Sci.10.1109/27.134026 20, 66 (1992);
6. I.D. KaganovichL.D. TsendinIEEE Trans. Plasma Sci.10.1109/27.13402920, 86 (1992).
7. T.J. Sommerer, W.N.G. Hitchon, and J.E. Lawler, Phys. Rev. Lett.10.1103/PhysRevLett.63.2361 63, 2361 (1989).
8. M. Surendra and D.B. Graves, Phys. Rev. Lett.10.1103/PhysRevLett.66.1469 66, 1469 (1991).
9. G. Gozadinos, M.M. Turner, and D. Vender, Phys. Rev. Lett.10.1103/PhysRevLett.87.135004 87, 135004 (2001).
10. E.M. Lifshitz and L.P. Pitaevskii, Physical Kinetics (Pergamon, Oxford, 1981), pp.�368–376.
11. Y.P. Raizer, M.N. Shneider, and N.A. Yatsenko, Radio-Frequency Capacitive Discharges (CRC Press, Boca Raton, FL, 1995).
12. R.L. Mace, G. Amery, and M.A. Hellberg, Phys. Plasmas10.1063/1.873256 6, 44 (1999).
13. I.D. Kaganovich, org/abs/physics/0203042.
14. S.V. Berezhnoi, I.D. Kaganovich, and L.D. Tsendin, Plasma Phys. Rep. 24, 556 (1998).
15. B. Ramamurthi, D.J. Economou, and I.D. Kaganovich, org/abs/physics/0208053.
16. I.D. Kaganovich, Phys. Rev. Lett.10.1103/PhysRevLett.82.327 82, 327 (1999).
17. Y.M. Aliev, I.D. Kaganovich, and H. Schlüter, Phys. Plasmas10.1063/1.872222 4, 2413 (1997).